JPS5635768A - Vapor depositing apparatus - Google Patents
Vapor depositing apparatusInfo
- Publication number
- JPS5635768A JPS5635768A JP11055579A JP11055579A JPS5635768A JP S5635768 A JPS5635768 A JP S5635768A JP 11055579 A JP11055579 A JP 11055579A JP 11055579 A JP11055579 A JP 11055579A JP S5635768 A JPS5635768 A JP S5635768A
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- wire
- magnetic field
- discharge
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Coating By Spraying Or Casting (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11055579A JPS5635768A (en) | 1979-08-30 | 1979-08-30 | Vapor depositing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11055579A JPS5635768A (en) | 1979-08-30 | 1979-08-30 | Vapor depositing apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5635768A true JPS5635768A (en) | 1981-04-08 |
JPS6124462B2 JPS6124462B2 (ja) | 1986-06-11 |
Family
ID=14538790
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11055579A Granted JPS5635768A (en) | 1979-08-30 | 1979-08-30 | Vapor depositing apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5635768A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58136775A (ja) * | 1982-02-08 | 1983-08-13 | Hitachi Ltd | 蒸着方法及び装置 |
JPS59146623U (ja) * | 1983-03-22 | 1984-10-01 | 東海ゴム工業株式会社 | 弾性継手 |
FR2564865A1 (fr) * | 1984-05-25 | 1985-11-29 | Wedtech Corp | Procede pour le revetement de creusets en quartz et en ceramique avec une matiere transformee electriquement en phase vapeur. |
JPS62250168A (ja) * | 1986-04-23 | 1987-10-31 | Hitachi Ltd | マイクロ波プラズマ成膜装置 |
US5900063A (en) * | 1994-02-02 | 1999-05-04 | The Australian National University | Method and apparatus for coating a substrate |
JP2008532255A (ja) * | 2005-03-07 | 2008-08-14 | サブ−ワン テクノロジー, インコーポレイテッド | 内面の各部分をコーティングするための方法及びシステム |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1990015888A1 (en) * | 1989-06-16 | 1990-12-27 | Litovskaya Selskokhozyaistvennaya Akademia | Installation for applying coatings on articles by explosion of a conductor |
-
1979
- 1979-08-30 JP JP11055579A patent/JPS5635768A/ja active Granted
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58136775A (ja) * | 1982-02-08 | 1983-08-13 | Hitachi Ltd | 蒸着方法及び装置 |
JPS6160913B2 (ja) * | 1982-02-08 | 1986-12-23 | Hitachi Ltd | |
JPS59146623U (ja) * | 1983-03-22 | 1984-10-01 | 東海ゴム工業株式会社 | 弾性継手 |
JPH0336738Y2 (ja) * | 1983-03-22 | 1991-08-05 | ||
FR2564865A1 (fr) * | 1984-05-25 | 1985-11-29 | Wedtech Corp | Procede pour le revetement de creusets en quartz et en ceramique avec une matiere transformee electriquement en phase vapeur. |
JPS62250168A (ja) * | 1986-04-23 | 1987-10-31 | Hitachi Ltd | マイクロ波プラズマ成膜装置 |
US5900063A (en) * | 1994-02-02 | 1999-05-04 | The Australian National University | Method and apparatus for coating a substrate |
JP2008532255A (ja) * | 2005-03-07 | 2008-08-14 | サブ−ワン テクノロジー, インコーポレイテッド | 内面の各部分をコーティングするための方法及びシステム |
Also Published As
Publication number | Publication date |
---|---|
JPS6124462B2 (ja) | 1986-06-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US3359422A (en) | Arc discharge atomic particle source for the production of neutrons | |
SE450539B (sv) | Plasmabagapparat for paleggning av overdrag | |
US3864640A (en) | Concentration and guidance of intense relativistic electron beams | |
ATE95573T1 (de) | Vorrichtung und verfahren zum auftragen von duennschichtueberzuegen im vacuum. | |
US3151259A (en) | Plasma accelerator system | |
JPS5635768A (en) | Vapor depositing apparatus | |
US2576601A (en) | Method of accelerating ions | |
US4582997A (en) | Ionic current regulating device | |
US3271001A (en) | Quick acting valve | |
GB862835A (en) | A device for producing energetic ions | |
SU528386A1 (ru) | Сорбционный вакуумный насос | |
JPS5768267A (en) | Plasma torch | |
GB927951A (en) | Accelerated plasma source | |
US3173013A (en) | Ion acceleration pulsed neutron generator | |
JPS5689835A (en) | Vapor phase growth apparatus | |
JP3766571B2 (ja) | 薄膜形成装置及びシャンティングアーク放電電極装置 | |
JPS5615838A (en) | Gaseous phase growth device | |
JPS5688315A (en) | Apparatus for gaseous phase growth | |
JPS62290867A (ja) | 薄膜形成装置 | |
JP2003297280A (ja) | イオン注入装置 | |
JPS55117856A (en) | Method and apparatus for separating impurities | |
SU436406A1 (ru) | Источник ионов | |
JPS5665975A (en) | Surface treatment of metal | |
SU683036A1 (ru) | Способ формировани электронного кольца | |
JPH05320886A (ja) | イオンプレーティング装置 |