JPS5630242A - Automatic axis-matching device for electron rays device - Google Patents
Automatic axis-matching device for electron rays deviceInfo
- Publication number
- JPS5630242A JPS5630242A JP10568579A JP10568579A JPS5630242A JP S5630242 A JPS5630242 A JP S5630242A JP 10568579 A JP10568579 A JP 10568579A JP 10568579 A JP10568579 A JP 10568579A JP S5630242 A JPS5630242 A JP S5630242A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- sent
- supplied
- electron rays
- divider
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10568579A JPS5630242A (en) | 1979-08-20 | 1979-08-20 | Automatic axis-matching device for electron rays device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10568579A JPS5630242A (en) | 1979-08-20 | 1979-08-20 | Automatic axis-matching device for electron rays device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5630242A true JPS5630242A (en) | 1981-03-26 |
Family
ID=14414254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10568579A Pending JPS5630242A (en) | 1979-08-20 | 1979-08-20 | Automatic axis-matching device for electron rays device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5630242A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57130352A (en) * | 1981-02-05 | 1982-08-12 | Akashi Seisakusho Co Ltd | Automatic axis alignment device for charged particle beam |
JPS61153552A (ja) * | 1984-12-26 | 1986-07-12 | Nec Corp | 自動x線回折装置 |
JPS6231930A (ja) * | 1985-08-02 | 1987-02-10 | Hitachi Ltd | 加速器結合透過型電子顕微鏡 |
JPS63121235A (ja) * | 1986-11-08 | 1988-05-25 | Anelva Corp | 電界放出イオン源 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51137369A (en) * | 1975-05-23 | 1976-11-27 | Hitachi Ltd | Automatic shaft alignment unit for electron optics system |
JPS5451551A (en) * | 1977-09-30 | 1979-04-23 | Hitachi Ltd | Laser position detector |
-
1979
- 1979-08-20 JP JP10568579A patent/JPS5630242A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51137369A (en) * | 1975-05-23 | 1976-11-27 | Hitachi Ltd | Automatic shaft alignment unit for electron optics system |
JPS5451551A (en) * | 1977-09-30 | 1979-04-23 | Hitachi Ltd | Laser position detector |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57130352A (en) * | 1981-02-05 | 1982-08-12 | Akashi Seisakusho Co Ltd | Automatic axis alignment device for charged particle beam |
JPS61153552A (ja) * | 1984-12-26 | 1986-07-12 | Nec Corp | 自動x線回折装置 |
JPS6231930A (ja) * | 1985-08-02 | 1987-02-10 | Hitachi Ltd | 加速器結合透過型電子顕微鏡 |
JPS63121235A (ja) * | 1986-11-08 | 1988-05-25 | Anelva Corp | 電界放出イオン源 |
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