JPS57130352A - Automatic axis alignment device for charged particle beam - Google Patents

Automatic axis alignment device for charged particle beam

Info

Publication number
JPS57130352A
JPS57130352A JP1606281A JP1606281A JPS57130352A JP S57130352 A JPS57130352 A JP S57130352A JP 1606281 A JP1606281 A JP 1606281A JP 1606281 A JP1606281 A JP 1606281A JP S57130352 A JPS57130352 A JP S57130352A
Authority
JP
Japan
Prior art keywords
charged particle
central axis
particle beam
turned
alignment device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1606281A
Other languages
Japanese (ja)
Inventor
Shigetomo Yamazaki
Masahiro Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Priority to JP1606281A priority Critical patent/JPS57130352A/en
Publication of JPS57130352A publication Critical patent/JPS57130352A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To hold a charged particle beam on a central axis with certainty and precision by controlling electric signals to deflection members so as to keep detection signals from a pair of charged particle quantity detectors at a constant ratio. CONSTITUTION:After a transfer switch 9 is turned to a terminal a and a variable resistor 12 is adjusted and calibrated, a meter 10 reading is made zero by a variable resistor 5' and the transfer switch 9 is turned to a terminal b. Then electric signals applied to deflection coils 1X, 1X' are controlled so that both detection signals from detectors 2X, 2X' are kept at a constant ratio by a negative feedback control apparatus through current-voltage conversion. Accordingly, any deviation of the electron beam from the central axis is corrected automatically, and the electron beam is kept aligned with the central axis continuously.
JP1606281A 1981-02-05 1981-02-05 Automatic axis alignment device for charged particle beam Pending JPS57130352A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1606281A JPS57130352A (en) 1981-02-05 1981-02-05 Automatic axis alignment device for charged particle beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1606281A JPS57130352A (en) 1981-02-05 1981-02-05 Automatic axis alignment device for charged particle beam

Publications (1)

Publication Number Publication Date
JPS57130352A true JPS57130352A (en) 1982-08-12

Family

ID=11906083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1606281A Pending JPS57130352A (en) 1981-02-05 1981-02-05 Automatic axis alignment device for charged particle beam

Country Status (1)

Country Link
JP (1) JPS57130352A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137369A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Automatic shaft alignment unit for electron optics system
JPS5539111A (en) * 1978-09-11 1980-03-18 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam axis centering device
JPS5630242A (en) * 1979-08-20 1981-03-26 Jeol Ltd Automatic axis-matching device for electron rays device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137369A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Automatic shaft alignment unit for electron optics system
JPS5539111A (en) * 1978-09-11 1980-03-18 Chiyou Lsi Gijutsu Kenkyu Kumiai Electron beam axis centering device
JPS5630242A (en) * 1979-08-20 1981-03-26 Jeol Ltd Automatic axis-matching device for electron rays device

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