JPS5626469A - Field-effect transistor - Google Patents

Field-effect transistor

Info

Publication number
JPS5626469A
JPS5626469A JP10195179A JP10195179A JPS5626469A JP S5626469 A JPS5626469 A JP S5626469A JP 10195179 A JP10195179 A JP 10195179A JP 10195179 A JP10195179 A JP 10195179A JP S5626469 A JPS5626469 A JP S5626469A
Authority
JP
Japan
Prior art keywords
membrane
sio2
amorphous
gate electrode
entire surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10195179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6214953B2 (enrdf_load_stackoverflow
Inventor
Isamu Miyagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10195179A priority Critical patent/JPS5626469A/ja
Publication of JPS5626469A publication Critical patent/JPS5626469A/ja
Publication of JPS6214953B2 publication Critical patent/JPS6214953B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/60Electrodes characterised by their materials
    • H10D64/66Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/661Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of silicon contacting the insulator, e.g. polysilicon having vertical doping variation
    • H10D64/662Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of silicon contacting the insulator, e.g. polysilicon having vertical doping variation the conductor further comprising additional layers, e.g. multiple silicon layers having different crystal structures

Landscapes

  • Optical Transform (AREA)
  • Electrodes Of Semiconductors (AREA)
JP10195179A 1979-08-10 1979-08-10 Field-effect transistor Granted JPS5626469A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10195179A JPS5626469A (en) 1979-08-10 1979-08-10 Field-effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10195179A JPS5626469A (en) 1979-08-10 1979-08-10 Field-effect transistor

Publications (2)

Publication Number Publication Date
JPS5626469A true JPS5626469A (en) 1981-03-14
JPS6214953B2 JPS6214953B2 (enrdf_load_stackoverflow) 1987-04-04

Family

ID=14314191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10195179A Granted JPS5626469A (en) 1979-08-10 1979-08-10 Field-effect transistor

Country Status (1)

Country Link
JP (1) JPS5626469A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3812996A1 (de) * 1988-04-19 1989-11-09 Swf Auto Electric Gmbh Elektromotor, insbesondere wischermotor zum antrieb einer scheibenwischeranlage in einem kraftfahrzeug

Also Published As

Publication number Publication date
JPS6214953B2 (enrdf_load_stackoverflow) 1987-04-04

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