JPS562638A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS562638A
JPS562638A JP7848579A JP7848579A JPS562638A JP S562638 A JPS562638 A JP S562638A JP 7848579 A JP7848579 A JP 7848579A JP 7848579 A JP7848579 A JP 7848579A JP S562638 A JPS562638 A JP S562638A
Authority
JP
Japan
Prior art keywords
oxide film
added
vapor phase
grown
psg6
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7848579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6214941B2 (enrdf_load_stackoverflow
Inventor
Seiichiro Takabayashi
Masanori Sakata
Yoshiaki Yadoiwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7848579A priority Critical patent/JPS562638A/ja
Publication of JPS562638A publication Critical patent/JPS562638A/ja
Publication of JPS6214941B2 publication Critical patent/JPS6214941B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP7848579A 1979-06-21 1979-06-21 Manufacture of semiconductor device Granted JPS562638A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7848579A JPS562638A (en) 1979-06-21 1979-06-21 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7848579A JPS562638A (en) 1979-06-21 1979-06-21 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS562638A true JPS562638A (en) 1981-01-12
JPS6214941B2 JPS6214941B2 (enrdf_load_stackoverflow) 1987-04-04

Family

ID=13663279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7848579A Granted JPS562638A (en) 1979-06-21 1979-06-21 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS562638A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61226930A (ja) * 1985-03-30 1986-10-08 Sony Corp 半導体装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5348681A (en) * 1976-10-15 1978-05-02 Matsushita Electronics Corp Semiconductor device and its production

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5348681A (en) * 1976-10-15 1978-05-02 Matsushita Electronics Corp Semiconductor device and its production

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61226930A (ja) * 1985-03-30 1986-10-08 Sony Corp 半導体装置

Also Published As

Publication number Publication date
JPS6214941B2 (enrdf_load_stackoverflow) 1987-04-04

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