JPS6214941B2 - - Google Patents
Info
- Publication number
- JPS6214941B2 JPS6214941B2 JP54078485A JP7848579A JPS6214941B2 JP S6214941 B2 JPS6214941 B2 JP S6214941B2 JP 54078485 A JP54078485 A JP 54078485A JP 7848579 A JP7848579 A JP 7848579A JP S6214941 B2 JPS6214941 B2 JP S6214941B2
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- phosphorus
- forming
- glass layer
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7848579A JPS562638A (en) | 1979-06-21 | 1979-06-21 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7848579A JPS562638A (en) | 1979-06-21 | 1979-06-21 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS562638A JPS562638A (en) | 1981-01-12 |
| JPS6214941B2 true JPS6214941B2 (enrdf_load_stackoverflow) | 1987-04-04 |
Family
ID=13663279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7848579A Granted JPS562638A (en) | 1979-06-21 | 1979-06-21 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS562638A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0691074B2 (ja) * | 1985-03-30 | 1994-11-14 | ソニー株式会社 | 半導体装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5348681A (en) * | 1976-10-15 | 1978-05-02 | Matsushita Electronics Corp | Semiconductor device and its production |
-
1979
- 1979-06-21 JP JP7848579A patent/JPS562638A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS562638A (en) | 1981-01-12 |
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