JPS5621361A - Manufacture of dynamic memory cell - Google Patents
Manufacture of dynamic memory cellInfo
- Publication number
- JPS5621361A JPS5621361A JP9765479A JP9765479A JPS5621361A JP S5621361 A JPS5621361 A JP S5621361A JP 9765479 A JP9765479 A JP 9765479A JP 9765479 A JP9765479 A JP 9765479A JP S5621361 A JPS5621361 A JP S5621361A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- capacity
- substrate
- poly
- memory cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
Landscapes
- Drying Of Semiconductors (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9765479A JPS5621361A (en) | 1979-07-31 | 1979-07-31 | Manufacture of dynamic memory cell |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9765479A JPS5621361A (en) | 1979-07-31 | 1979-07-31 | Manufacture of dynamic memory cell |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5621361A true JPS5621361A (en) | 1981-02-27 |
JPS6138867B2 JPS6138867B2 (fr) | 1986-09-01 |
Family
ID=14198061
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9765479A Granted JPS5621361A (en) | 1979-07-31 | 1979-07-31 | Manufacture of dynamic memory cell |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5621361A (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5843569A (ja) * | 1981-09-09 | 1983-03-14 | Nec Corp | 半導体装置の製造方法 |
JPH01194346A (ja) * | 1988-01-28 | 1989-08-04 | Toshiba Corp | 半導体記憶装置 |
JPH08317720A (ja) * | 1996-06-17 | 1996-12-03 | Kubota Corp | コンバイン |
-
1979
- 1979-07-31 JP JP9765479A patent/JPS5621361A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5843569A (ja) * | 1981-09-09 | 1983-03-14 | Nec Corp | 半導体装置の製造方法 |
JPH01194346A (ja) * | 1988-01-28 | 1989-08-04 | Toshiba Corp | 半導体記憶装置 |
JPH08317720A (ja) * | 1996-06-17 | 1996-12-03 | Kubota Corp | コンバイン |
JP2601647B2 (ja) * | 1996-06-17 | 1997-04-16 | 株式会社クボタ | コンバイン |
Also Published As
Publication number | Publication date |
---|---|
JPS6138867B2 (fr) | 1986-09-01 |
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