JPS5617021A - Surface treatment of substrate - Google Patents

Surface treatment of substrate

Info

Publication number
JPS5617021A
JPS5617021A JP9226679A JP9226679A JPS5617021A JP S5617021 A JPS5617021 A JP S5617021A JP 9226679 A JP9226679 A JP 9226679A JP 9226679 A JP9226679 A JP 9226679A JP S5617021 A JPS5617021 A JP S5617021A
Authority
JP
Japan
Prior art keywords
substrates
plate
solution
substrate
bubbles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9226679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6325498B2 (OSRAM
Inventor
Soji Omura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9226679A priority Critical patent/JPS5617021A/ja
Publication of JPS5617021A publication Critical patent/JPS5617021A/ja
Publication of JPS6325498B2 publication Critical patent/JPS6325498B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P52/00—

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Weting (AREA)
JP9226679A 1979-07-20 1979-07-20 Surface treatment of substrate Granted JPS5617021A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9226679A JPS5617021A (en) 1979-07-20 1979-07-20 Surface treatment of substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9226679A JPS5617021A (en) 1979-07-20 1979-07-20 Surface treatment of substrate

Publications (2)

Publication Number Publication Date
JPS5617021A true JPS5617021A (en) 1981-02-18
JPS6325498B2 JPS6325498B2 (OSRAM) 1988-05-25

Family

ID=14049587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9226679A Granted JPS5617021A (en) 1979-07-20 1979-07-20 Surface treatment of substrate

Country Status (1)

Country Link
JP (1) JPS5617021A (OSRAM)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58123730A (ja) * 1982-01-18 1983-07-23 Toshiba Corp 半導体ウエハ−エツチング装置
JPS6386525A (ja) * 1986-09-30 1988-04-16 Kyushu Denshi Kinzoku Kk 半導体シリコンウエ−ハのエツチング装置
JPH0160532U (OSRAM) * 1987-10-13 1989-04-17
JP2009522771A (ja) * 2005-12-30 2009-06-11 ラム リサーチ コーポレーション 基板から汚染を除去するための方法および装置
CN103377878A (zh) * 2012-04-18 2013-10-30 三菱电机株式会社 凹凸化硅基板的制造方法、处理装置和太阳能电池元件的制造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5093775A (OSRAM) * 1973-12-19 1975-07-26
JPS5110770A (en) * 1974-07-16 1976-01-28 Matsushita Electric Industrial Co Ltd Etsuchinguhoho
JPS5115977A (en) * 1974-07-31 1976-02-07 Hitachi Ltd Banjobutsuno keishaetsuchinguho

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5093775A (OSRAM) * 1973-12-19 1975-07-26
JPS5110770A (en) * 1974-07-16 1976-01-28 Matsushita Electric Industrial Co Ltd Etsuchinguhoho
JPS5115977A (en) * 1974-07-31 1976-02-07 Hitachi Ltd Banjobutsuno keishaetsuchinguho

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58123730A (ja) * 1982-01-18 1983-07-23 Toshiba Corp 半導体ウエハ−エツチング装置
JPS6386525A (ja) * 1986-09-30 1988-04-16 Kyushu Denshi Kinzoku Kk 半導体シリコンウエ−ハのエツチング装置
JPH0160532U (OSRAM) * 1987-10-13 1989-04-17
JP2009522771A (ja) * 2005-12-30 2009-06-11 ラム リサーチ コーポレーション 基板から汚染を除去するための方法および装置
CN103377878A (zh) * 2012-04-18 2013-10-30 三菱电机株式会社 凹凸化硅基板的制造方法、处理装置和太阳能电池元件的制造方法

Also Published As

Publication number Publication date
JPS6325498B2 (OSRAM) 1988-05-25

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