JPS56169376A - Light receiving semiconductor device - Google Patents
Light receiving semiconductor deviceInfo
- Publication number
- JPS56169376A JPS56169376A JP7236280A JP7236280A JPS56169376A JP S56169376 A JPS56169376 A JP S56169376A JP 7236280 A JP7236280 A JP 7236280A JP 7236280 A JP7236280 A JP 7236280A JP S56169376 A JPS56169376 A JP S56169376A
- Authority
- JP
- Japan
- Prior art keywords
- film
- semiconductor
- substrate
- protective film
- sio2
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 8
- 229910052681 coesite Inorganic materials 0.000 abstract 4
- 229910052906 cristobalite Inorganic materials 0.000 abstract 4
- 230000001681 protective effect Effects 0.000 abstract 4
- 239000000377 silicon dioxide Substances 0.000 abstract 4
- 235000012239 silicon dioxide Nutrition 0.000 abstract 4
- 229910052682 stishovite Inorganic materials 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- 229910052905 tridymite Inorganic materials 0.000 abstract 4
- 238000001259 photo etching Methods 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7236280A JPS56169376A (en) | 1980-05-30 | 1980-05-30 | Light receiving semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7236280A JPS56169376A (en) | 1980-05-30 | 1980-05-30 | Light receiving semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56169376A true JPS56169376A (en) | 1981-12-26 |
Family
ID=13487121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7236280A Pending JPS56169376A (en) | 1980-05-30 | 1980-05-30 | Light receiving semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56169376A (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4832469A (ja) * | 1971-08-31 | 1973-04-28 | ||
| JPS5136088A (ja) * | 1974-08-06 | 1976-03-26 | Telecommunications Sa |
-
1980
- 1980-05-30 JP JP7236280A patent/JPS56169376A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4832469A (ja) * | 1971-08-31 | 1973-04-28 | ||
| JPS5136088A (ja) * | 1974-08-06 | 1976-03-26 | Telecommunications Sa |
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