JPS52117555A - Formation of photo mask - Google Patents

Formation of photo mask

Info

Publication number
JPS52117555A
JPS52117555A JP3482876A JP3482876A JPS52117555A JP S52117555 A JPS52117555 A JP S52117555A JP 3482876 A JP3482876 A JP 3482876A JP 3482876 A JP3482876 A JP 3482876A JP S52117555 A JPS52117555 A JP S52117555A
Authority
JP
Japan
Prior art keywords
photo mask
formation
resist
etching
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3482876A
Other languages
Japanese (ja)
Inventor
Takashi Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3482876A priority Critical patent/JPS52117555A/en
Publication of JPS52117555A publication Critical patent/JPS52117555A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To form non-light transmissible layer on light transmissible substrate with impurity added in order to increase the etching rate, and then to form the groove through ion etching or spatter etching using the resist for the mask and then to to remove the resist. Thus, photo mask of good adhesion property can be obtained.
COPYRIGHT: (C)1977,JPO&Japio
JP3482876A 1976-03-30 1976-03-30 Formation of photo mask Pending JPS52117555A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3482876A JPS52117555A (en) 1976-03-30 1976-03-30 Formation of photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3482876A JPS52117555A (en) 1976-03-30 1976-03-30 Formation of photo mask

Publications (1)

Publication Number Publication Date
JPS52117555A true JPS52117555A (en) 1977-10-03

Family

ID=12425049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3482876A Pending JPS52117555A (en) 1976-03-30 1976-03-30 Formation of photo mask

Country Status (1)

Country Link
JP (1) JPS52117555A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016018187A (en) * 2014-07-11 2016-02-01 株式会社ディスコ Method for producing exposure mask

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016018187A (en) * 2014-07-11 2016-02-01 株式会社ディスコ Method for producing exposure mask

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