JPS56162037A - Detection for foreign matter on surface - Google Patents

Detection for foreign matter on surface

Info

Publication number
JPS56162037A
JPS56162037A JP6611280A JP6611280A JPS56162037A JP S56162037 A JPS56162037 A JP S56162037A JP 6611280 A JP6611280 A JP 6611280A JP 6611280 A JP6611280 A JP 6611280A JP S56162037 A JPS56162037 A JP S56162037A
Authority
JP
Japan
Prior art keywords
detected
foreign matter
ccd camera
light
time
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6611280A
Other languages
English (en)
Inventor
Junya Ishizaki
Tsutomu Kunida
Taro Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP6611280A priority Critical patent/JPS56162037A/ja
Publication of JPS56162037A publication Critical patent/JPS56162037A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V20/00—Scenes; Scene-specific elements
    • G06V20/60—Type of objects
    • G06V20/66—Trinkets, e.g. shirt buttons or jewellery items
JP6611280A 1980-05-19 1980-05-19 Detection for foreign matter on surface Pending JPS56162037A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6611280A JPS56162037A (en) 1980-05-19 1980-05-19 Detection for foreign matter on surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6611280A JPS56162037A (en) 1980-05-19 1980-05-19 Detection for foreign matter on surface

Publications (1)

Publication Number Publication Date
JPS56162037A true JPS56162037A (en) 1981-12-12

Family

ID=13306471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6611280A Pending JPS56162037A (en) 1980-05-19 1980-05-19 Detection for foreign matter on surface

Country Status (1)

Country Link
JP (1) JPS56162037A (ja)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59192943A (ja) * 1983-04-15 1984-11-01 Hitachi Ltd 繰返しパタ−ンの欠陥検査装置
EP0144049A2 (en) * 1983-11-26 1985-06-12 Takeda Chemical Industries, Ltd. An apparatus for inspecting solid drugs and a method therefor
JPS60188364U (ja) * 1984-05-25 1985-12-13 エヌオーケー株式会社 表面欠陥検査装置
JPS60188365U (ja) * 1984-05-25 1985-12-13 エヌオーケー株式会社 表面欠陥検査装置
JPS61187637A (ja) * 1985-02-15 1986-08-21 Hitachi Ltd 外観検査装置
JPS62261045A (ja) * 1986-05-06 1987-11-13 Hitachi Electronics Eng Co Ltd 表面検査装置
WO1987007024A1 (en) * 1986-05-05 1987-11-19 Hughes Aircraft Company Method and apparatus for identifying particulate matter
JPH05264466A (ja) * 1992-12-04 1993-10-12 Hitachi Ltd 繰返しパターンの欠陥検査装置
JPH05264467A (ja) * 1992-12-04 1993-10-12 Hitachi Ltd 繰返しパターンの欠陥検査装置
JPH05264465A (ja) * 1992-12-04 1993-10-12 Hitachi Ltd 繰返しパターンの欠陥検査装置
JPH05264464A (ja) * 1992-12-04 1993-10-12 Hitachi Ltd 繰返しパターンの欠陥検査装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52153487A (en) * 1976-06-16 1977-12-20 Mitsubishi Rayon Co Defect detecting method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52153487A (en) * 1976-06-16 1977-12-20 Mitsubishi Rayon Co Defect detecting method

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59192943A (ja) * 1983-04-15 1984-11-01 Hitachi Ltd 繰返しパタ−ンの欠陥検査装置
JPH0526136B2 (ja) * 1983-04-15 1993-04-15 Hitachi Ltd
EP0144049A2 (en) * 1983-11-26 1985-06-12 Takeda Chemical Industries, Ltd. An apparatus for inspecting solid drugs and a method therefor
JPS60188364U (ja) * 1984-05-25 1985-12-13 エヌオーケー株式会社 表面欠陥検査装置
JPS60188365U (ja) * 1984-05-25 1985-12-13 エヌオーケー株式会社 表面欠陥検査装置
JPS61187637A (ja) * 1985-02-15 1986-08-21 Hitachi Ltd 外観検査装置
WO1987007024A1 (en) * 1986-05-05 1987-11-19 Hughes Aircraft Company Method and apparatus for identifying particulate matter
JPS62261045A (ja) * 1986-05-06 1987-11-13 Hitachi Electronics Eng Co Ltd 表面検査装置
JPH05264466A (ja) * 1992-12-04 1993-10-12 Hitachi Ltd 繰返しパターンの欠陥検査装置
JPH05264467A (ja) * 1992-12-04 1993-10-12 Hitachi Ltd 繰返しパターンの欠陥検査装置
JPH05264465A (ja) * 1992-12-04 1993-10-12 Hitachi Ltd 繰返しパターンの欠陥検査装置
JPH05264464A (ja) * 1992-12-04 1993-10-12 Hitachi Ltd 繰返しパターンの欠陥検査装置

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