JPS56157846A - Method for forming on both surfaces of heating part structured in bridging state - Google Patents
Method for forming on both surfaces of heating part structured in bridging stateInfo
- Publication number
- JPS56157846A JPS56157846A JP6139380A JP6139380A JPS56157846A JP S56157846 A JPS56157846 A JP S56157846A JP 6139380 A JP6139380 A JP 6139380A JP 6139380 A JP6139380 A JP 6139380A JP S56157846 A JPS56157846 A JP S56157846A
- Authority
- JP
- Japan
- Prior art keywords
- film
- bridging state
- bridging
- spinner
- heating part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title abstract 5
- 238000000034 method Methods 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 229910052681 coesite Inorganic materials 0.000 abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 abstract 3
- 239000000463 material Substances 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract 3
- 229910052682 stishovite Inorganic materials 0.000 abstract 3
- 239000000126 substance Substances 0.000 abstract 3
- 229910052905 tridymite Inorganic materials 0.000 abstract 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 239000007788 liquid Substances 0.000 abstract 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- LDDQLRUQCUTJBB-UHFFFAOYSA-N ammonium fluoride Chemical compound [NH4+].[F-] LDDQLRUQCUTJBB-UHFFFAOYSA-N 0.000 abstract 1
- 239000011230 binding agent Substances 0.000 abstract 1
- XZUAPPXGIFNDRA-UHFFFAOYSA-N ethane-1,2-diamine;hydrate Chemical compound O.NCCN XZUAPPXGIFNDRA-UHFFFAOYSA-N 0.000 abstract 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 abstract 1
- 229910052763 palladium Inorganic materials 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
- 229910052697 platinum Inorganic materials 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 239000004332 silver Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Surface Heating Bodies (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6139380A JPS56157846A (en) | 1980-05-09 | 1980-05-09 | Method for forming on both surfaces of heating part structured in bridging state |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6139380A JPS56157846A (en) | 1980-05-09 | 1980-05-09 | Method for forming on both surfaces of heating part structured in bridging state |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56157846A true JPS56157846A (en) | 1981-12-05 |
| JPS6127704B2 JPS6127704B2 (enrdf_load_stackoverflow) | 1986-06-26 |
Family
ID=13169862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6139380A Granted JPS56157846A (en) | 1980-05-09 | 1980-05-09 | Method for forming on both surfaces of heating part structured in bridging state |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56157846A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62220850A (ja) * | 1986-03-24 | 1987-09-29 | Ricoh Seiki Kk | 雰囲気検出装置 |
-
1980
- 1980-05-09 JP JP6139380A patent/JPS56157846A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62220850A (ja) * | 1986-03-24 | 1987-09-29 | Ricoh Seiki Kk | 雰囲気検出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6127704B2 (enrdf_load_stackoverflow) | 1986-06-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB1523677A (en) | Semiconductor device and a method for manufacturing the same | |
| JPS5235983A (en) | Manufacturing method of field effective transistor | |
| JPS558026A (en) | Semi-conductor device manufacturing method | |
| JPS5546568A (en) | Method of fabricating semicondcuctor device | |
| JPS57192846A (en) | Humidity sensor and manufacture thereof | |
| JPS56157846A (en) | Method for forming on both surfaces of heating part structured in bridging state | |
| JPS5658269A (en) | Mos type semiconductor device | |
| JPS56125844A (en) | Manufacture of semiconductor element | |
| JPS6450439A (en) | Manufacture of semiconductor device | |
| JPS5241654A (en) | Formation of roughened coating layer by electro-phoresis and coating c omposition for the same | |
| JPS5748249A (en) | Semiconductor device | |
| JPS56137675A (en) | Semiconductor device and manufacture thereof | |
| JPS5553452A (en) | Semiconductor device | |
| JPS5543847A (en) | Forming method of multilayer interconnection | |
| JPS56125856A (en) | Manufacture of semiconductor device | |
| JPS5715423A (en) | Manufacture of semiconductor device | |
| JPS5797630A (en) | Manufacture of semiconductor device | |
| JPS5784138A (en) | Manufacture of mesa semiconductor device | |
| JPS56148825A (en) | Manufacture of semiconductor device | |
| JPS5515286A (en) | Manufacturing method for semiconductor device | |
| JPS5717129A (en) | Manufacture of semiconductor device | |
| JPS5792872A (en) | Diode | |
| JPS5664471A (en) | Detector for pressure of semiconductor | |
| JPS5799781A (en) | Manufacture of semiconductor device | |
| JPS54105982A (en) | Mis-type semiconductor device and its manufacture |