JPS6127704B2 - - Google Patents
Info
- Publication number
- JPS6127704B2 JPS6127704B2 JP6139380A JP6139380A JPS6127704B2 JP S6127704 B2 JPS6127704 B2 JP S6127704B2 JP 6139380 A JP6139380 A JP 6139380A JP 6139380 A JP6139380 A JP 6139380A JP S6127704 B2 JPS6127704 B2 JP S6127704B2
- Authority
- JP
- Japan
- Prior art keywords
- bridge
- heat generating
- film
- gas
- electric heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 17
- 239000010408 film Substances 0.000 description 10
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 238000005530 etching Methods 0.000 description 8
- 239000012528 membrane Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 239000000243 solution Substances 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000007084 catalytic combustion reaction Methods 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 235000019353 potassium silicate Nutrition 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Surface Heating Bodies (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6139380A JPS56157846A (en) | 1980-05-09 | 1980-05-09 | Method for forming on both surfaces of heating part structured in bridging state |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6139380A JPS56157846A (en) | 1980-05-09 | 1980-05-09 | Method for forming on both surfaces of heating part structured in bridging state |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56157846A JPS56157846A (en) | 1981-12-05 |
| JPS6127704B2 true JPS6127704B2 (enrdf_load_stackoverflow) | 1986-06-26 |
Family
ID=13169862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6139380A Granted JPS56157846A (en) | 1980-05-09 | 1980-05-09 | Method for forming on both surfaces of heating part structured in bridging state |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56157846A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH079411B2 (ja) * | 1986-03-24 | 1995-02-01 | リコ−精器株式会社 | 雰囲気検出装置 |
-
1980
- 1980-05-09 JP JP6139380A patent/JPS56157846A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56157846A (en) | 1981-12-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6323500B2 (enrdf_load_stackoverflow) | ||
| US5780173A (en) | Durable platinum/polyimide sensing structures | |
| US4706493A (en) | Semiconductor gas sensor having thermally isolated site | |
| JP2829416B2 (ja) | 感ガス素子 | |
| KR100438190B1 (ko) | 가스센서 및 그 제조방법 | |
| SE503265C2 (sv) | Förfarande och anordning för gasdetektion | |
| JPH01109250A (ja) | ガスセンサ | |
| JP2018063241A (ja) | ガスセンサ | |
| JPS6136616B2 (enrdf_load_stackoverflow) | ||
| JP2002328109A (ja) | 水素ガス検出素子及びその製造方法 | |
| JPH08278274A (ja) | ガスセンサ及びその製造方法 | |
| JPH04507461A (ja) | 自己保持型薄膜フィラメントセンサーとその形成方法及びガス検出器とガスクロマトグラフィーへの適用 | |
| JP3485151B2 (ja) | 接触燃焼式ガスセンサ | |
| JPS6127704B2 (enrdf_load_stackoverflow) | ||
| JP3047137B2 (ja) | 湿度センサの製造方法 | |
| US4347550A (en) | Sensor detector element for an electrical hygrometer | |
| JP4010738B2 (ja) | ガスセンサ及びガス検出器及びガス検出方法 | |
| JPS6122899B2 (enrdf_load_stackoverflow) | ||
| JPH06174674A (ja) | 半導体ガスセンサ | |
| JPH0862168A (ja) | 窒素酸化物検出素子 | |
| JPH04273050A (ja) | ガスセンサ | |
| JPS6222096B2 (enrdf_load_stackoverflow) | ||
| JPH10160698A (ja) | マイクロセンサ | |
| JP2000338081A (ja) | ガスセンサ | |
| JPS6127705B2 (enrdf_load_stackoverflow) |