JPS56157801A - Cathode reducing apparatus for measuring thickness of oxide thin film - Google Patents

Cathode reducing apparatus for measuring thickness of oxide thin film

Info

Publication number
JPS56157801A
JPS56157801A JP6110580A JP6110580A JPS56157801A JP S56157801 A JPS56157801 A JP S56157801A JP 6110580 A JP6110580 A JP 6110580A JP 6110580 A JP6110580 A JP 6110580A JP S56157801 A JPS56157801 A JP S56157801A
Authority
JP
Japan
Prior art keywords
anode
sample
cathode
thin film
oxide thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6110580A
Other languages
Japanese (ja)
Inventor
Kunihiko Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP6110580A priority Critical patent/JPS56157801A/en
Publication of JPS56157801A publication Critical patent/JPS56157801A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Electrochemical Coating By Surface Reaction (AREA)

Abstract

PURPOSE: To permit the measurement of the thickness of the oxide thin film with fewer errors in an electrolitic cell of simple shape without the need for a reference electrode, by using sample to be measured as a cathode and a material having a capacity as an anode opposed thereto.
CONSTITUTION: A sample 7 to be measured is used as a cathode, an anode is therearound formed by using a material which is usually employed as the electrode of an alkaline battery, such as nickel, cadmium or manganess dioxide, and they are submerged in an electrolitic cell 6 to perform electrolysis. Even though gradually oxidized, the anode 8 generates no oxygen because it has a capacity. Therefore, the sample 7 is never oxidized. In addition, the potential of the anode 8 reducing the cathode 7 hardly changes. Thereby, it is possible to manufacture an apparatus which can measure even the sample 7 of complicated shape with fewer errors by using the anode 8 and a single electrolytic cell of simple shape, without using a reference electrode.
COPYRIGHT: (C)1981,JPO&Japio
JP6110580A 1980-05-08 1980-05-08 Cathode reducing apparatus for measuring thickness of oxide thin film Pending JPS56157801A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6110580A JPS56157801A (en) 1980-05-08 1980-05-08 Cathode reducing apparatus for measuring thickness of oxide thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6110580A JPS56157801A (en) 1980-05-08 1980-05-08 Cathode reducing apparatus for measuring thickness of oxide thin film

Publications (1)

Publication Number Publication Date
JPS56157801A true JPS56157801A (en) 1981-12-05

Family

ID=13161460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6110580A Pending JPS56157801A (en) 1980-05-08 1980-05-08 Cathode reducing apparatus for measuring thickness of oxide thin film

Country Status (1)

Country Link
JP (1) JPS56157801A (en)

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