JPS56157801A - Cathode reducing apparatus for measuring thickness of oxide thin film - Google Patents
Cathode reducing apparatus for measuring thickness of oxide thin filmInfo
- Publication number
- JPS56157801A JPS56157801A JP6110580A JP6110580A JPS56157801A JP S56157801 A JPS56157801 A JP S56157801A JP 6110580 A JP6110580 A JP 6110580A JP 6110580 A JP6110580 A JP 6110580A JP S56157801 A JPS56157801 A JP S56157801A
- Authority
- JP
- Japan
- Prior art keywords
- anode
- sample
- cathode
- thin film
- oxide thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Electrochemical Coating By Surface Reaction (AREA)
Abstract
PURPOSE: To permit the measurement of the thickness of the oxide thin film with fewer errors in an electrolitic cell of simple shape without the need for a reference electrode, by using sample to be measured as a cathode and a material having a capacity as an anode opposed thereto.
CONSTITUTION: A sample 7 to be measured is used as a cathode, an anode is therearound formed by using a material which is usually employed as the electrode of an alkaline battery, such as nickel, cadmium or manganess dioxide, and they are submerged in an electrolitic cell 6 to perform electrolysis. Even though gradually oxidized, the anode 8 generates no oxygen because it has a capacity. Therefore, the sample 7 is never oxidized. In addition, the potential of the anode 8 reducing the cathode 7 hardly changes. Thereby, it is possible to manufacture an apparatus which can measure even the sample 7 of complicated shape with fewer errors by using the anode 8 and a single electrolytic cell of simple shape, without using a reference electrode.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6110580A JPS56157801A (en) | 1980-05-08 | 1980-05-08 | Cathode reducing apparatus for measuring thickness of oxide thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6110580A JPS56157801A (en) | 1980-05-08 | 1980-05-08 | Cathode reducing apparatus for measuring thickness of oxide thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56157801A true JPS56157801A (en) | 1981-12-05 |
Family
ID=13161460
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6110580A Pending JPS56157801A (en) | 1980-05-08 | 1980-05-08 | Cathode reducing apparatus for measuring thickness of oxide thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56157801A (en) |
-
1980
- 1980-05-08 JP JP6110580A patent/JPS56157801A/en active Pending
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