JPS56157064A - Manufacture of mis type semiconductor device - Google Patents

Manufacture of mis type semiconductor device

Info

Publication number
JPS56157064A
JPS56157064A JP6086680A JP6086680A JPS56157064A JP S56157064 A JPS56157064 A JP S56157064A JP 6086680 A JP6086680 A JP 6086680A JP 6086680 A JP6086680 A JP 6086680A JP S56157064 A JPS56157064 A JP S56157064A
Authority
JP
Japan
Prior art keywords
insulating film
region
mask layer
gate electrode
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6086680A
Other languages
Japanese (ja)
Inventor
Takehide Shirato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6086680A priority Critical patent/JPS56157064A/en
Publication of JPS56157064A publication Critical patent/JPS56157064A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)

Abstract

PURPOSE:To simplify the manufacturing process by a method wherein a mask layer of the same quality as that of a gate electrode is formed on a surface of the boundary zone of a drain region and a field insulating film to permit a source region and the drain region to be formed. CONSTITUTION:The field insulating film 9 is selectively formed on a semiconductor substrate having a (-) conductive type to effect marking an element forming region. Then, a gate insulating film 4 is forming on the element formed region, and then, the gate electrode 3 is formed on the gate insulating film 4. The mask layer 3' is in the zone where the gate insulating film 4 and the field insulating film 9 continue each other. Subsequently, a reverse conductive type impurity is introduced in the element forming region with the gate electrode 3 and the mask layer 3' as the masks.
JP6086680A 1980-05-08 1980-05-08 Manufacture of mis type semiconductor device Pending JPS56157064A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6086680A JPS56157064A (en) 1980-05-08 1980-05-08 Manufacture of mis type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6086680A JPS56157064A (en) 1980-05-08 1980-05-08 Manufacture of mis type semiconductor device

Publications (1)

Publication Number Publication Date
JPS56157064A true JPS56157064A (en) 1981-12-04

Family

ID=13154733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6086680A Pending JPS56157064A (en) 1980-05-08 1980-05-08 Manufacture of mis type semiconductor device

Country Status (1)

Country Link
JP (1) JPS56157064A (en)

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