JPS56153783A - Photoelectric converting element - Google Patents
Photoelectric converting elementInfo
- Publication number
- JPS56153783A JPS56153783A JP5734980A JP5734980A JPS56153783A JP S56153783 A JPS56153783 A JP S56153783A JP 5734980 A JP5734980 A JP 5734980A JP 5734980 A JP5734980 A JP 5734980A JP S56153783 A JPS56153783 A JP S56153783A
- Authority
- JP
- Japan
- Prior art keywords
- photoconductors
- shapes
- electrodes
- end surfaces
- comblike
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 238000000638 solvent extraction Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
Abstract
PURPOSE:To prevent the disconnection of electrodes due to the generation of an inverse taper by photoetching the photoconductors into the comblike or sawteeth patterns. CONSTITUTION:Photoconductors 2 are formed on an insulating substrate 1. The photoconductors 2 are etched using photoresists formed on the photoconductors 2 in comblike shapes 7 or sawteeth shapes as masks. Thus, the end surfaces of the photoconductors 2 contacting with separated electrodes 3 and common electrodes 4 are made comblike 7 or sawteeth shapes. According to such shapes of the end surfaces, the length of edges partitioning the end surfaces becomes very longer than the simple shapes of the end surfaces of a square or a rectangle, and the electrodes are formed over these whole edges. Consequently, the probability of stage-cut based on the electrodes 3 or 4 due to an inverse taper is decreased extremely.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55057349A JPS5928066B2 (en) | 1980-04-30 | 1980-04-30 | Photoelectric conversion element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55057349A JPS5928066B2 (en) | 1980-04-30 | 1980-04-30 | Photoelectric conversion element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56153783A true JPS56153783A (en) | 1981-11-27 |
| JPS5928066B2 JPS5928066B2 (en) | 1984-07-10 |
Family
ID=13053091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55057349A Expired JPS5928066B2 (en) | 1980-04-30 | 1980-04-30 | Photoelectric conversion element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5928066B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58216459A (en) * | 1982-06-09 | 1983-12-16 | Matsushita Electric Ind Co Ltd | Photoelectric converter and manufacture thereof |
| JPS58195456U (en) * | 1982-06-21 | 1983-12-26 | 日本電気株式会社 | Wiring connection structure |
| US9125330B2 (en) | 2011-11-05 | 2015-09-01 | Tpk Touch Systems (Xiamen) Inc. | Pin structure and pin connection structure thereof |
-
1980
- 1980-04-30 JP JP55057349A patent/JPS5928066B2/en not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58216459A (en) * | 1982-06-09 | 1983-12-16 | Matsushita Electric Ind Co Ltd | Photoelectric converter and manufacture thereof |
| JPH0228903B2 (en) * | 1982-06-09 | 1990-06-27 | Matsushita Electric Ind Co Ltd | |
| JPS58195456U (en) * | 1982-06-21 | 1983-12-26 | 日本電気株式会社 | Wiring connection structure |
| US9125330B2 (en) | 2011-11-05 | 2015-09-01 | Tpk Touch Systems (Xiamen) Inc. | Pin structure and pin connection structure thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5928066B2 (en) | 1984-07-10 |
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