JPS56148823A - Production of planer type semiconductor device - Google Patents
Production of planer type semiconductor deviceInfo
- Publication number
- JPS56148823A JPS56148823A JP5171380A JP5171380A JPS56148823A JP S56148823 A JPS56148823 A JP S56148823A JP 5171380 A JP5171380 A JP 5171380A JP 5171380 A JP5171380 A JP 5171380A JP S56148823 A JPS56148823 A JP S56148823A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- heat treatment
- type semiconductor
- si3n4 layer
- production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 3
- 230000002159 abnormal effect Effects 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000002513 implantation Methods 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 238000005468 ion implantation Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
- H01L21/2251—Diffusion into or out of group IV semiconductors
- H01L21/2252—Diffusion into or out of group IV semiconductors using predeposition of impurities into the semiconductor surface, e.g. from a gaseous phase
- H01L21/2253—Diffusion into or out of group IV semiconductors using predeposition of impurities into the semiconductor surface, e.g. from a gaseous phase by ion implantation
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5171380A JPS56148823A (en) | 1980-04-21 | 1980-04-21 | Production of planer type semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5171380A JPS56148823A (en) | 1980-04-21 | 1980-04-21 | Production of planer type semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56148823A true JPS56148823A (en) | 1981-11-18 |
Family
ID=12894528
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5171380A Pending JPS56148823A (en) | 1980-04-21 | 1980-04-21 | Production of planer type semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56148823A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0774124A (ja) * | 1990-03-09 | 1995-03-17 | Goldstar Electron Co Ltd | イオン注入阻止方法 |
-
1980
- 1980-04-21 JP JP5171380A patent/JPS56148823A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0774124A (ja) * | 1990-03-09 | 1995-03-17 | Goldstar Electron Co Ltd | イオン注入阻止方法 |
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