JPS56140670A - Semiconductor pressure sensor - Google Patents

Semiconductor pressure sensor

Info

Publication number
JPS56140670A
JPS56140670A JP4421680A JP4421680A JPS56140670A JP S56140670 A JPS56140670 A JP S56140670A JP 4421680 A JP4421680 A JP 4421680A JP 4421680 A JP4421680 A JP 4421680A JP S56140670 A JPS56140670 A JP S56140670A
Authority
JP
Japan
Prior art keywords
gauge resistors
resistance values
diaphragm
resistance
absolute pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4421680A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6154271B2 (cg-RX-API-DMAC7.html
Inventor
Toru Shinmen
Mitsuhiko Asano
Hideaki Goshima
Hirokazu Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Ltd
Original Assignee
Fujikura Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Ltd filed Critical Fujikura Ltd
Priority to JP4421680A priority Critical patent/JPS56140670A/ja
Publication of JPS56140670A publication Critical patent/JPS56140670A/ja
Publication of JPS6154271B2 publication Critical patent/JPS6154271B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
JP4421680A 1980-04-04 1980-04-04 Semiconductor pressure sensor Granted JPS56140670A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4421680A JPS56140670A (en) 1980-04-04 1980-04-04 Semiconductor pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4421680A JPS56140670A (en) 1980-04-04 1980-04-04 Semiconductor pressure sensor

Publications (2)

Publication Number Publication Date
JPS56140670A true JPS56140670A (en) 1981-11-04
JPS6154271B2 JPS6154271B2 (cg-RX-API-DMAC7.html) 1986-11-21

Family

ID=12685341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4421680A Granted JPS56140670A (en) 1980-04-04 1980-04-04 Semiconductor pressure sensor

Country Status (1)

Country Link
JP (1) JPS56140670A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6325982A (ja) * 1986-07-18 1988-02-03 Nissan Motor Co Ltd 半導体圧力変換装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6325982A (ja) * 1986-07-18 1988-02-03 Nissan Motor Co Ltd 半導体圧力変換装置の製造方法

Also Published As

Publication number Publication date
JPS6154271B2 (cg-RX-API-DMAC7.html) 1986-11-21

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