JPS6154271B2 - - Google Patents

Info

Publication number
JPS6154271B2
JPS6154271B2 JP55044216A JP4421680A JPS6154271B2 JP S6154271 B2 JPS6154271 B2 JP S6154271B2 JP 55044216 A JP55044216 A JP 55044216A JP 4421680 A JP4421680 A JP 4421680A JP S6154271 B2 JPS6154271 B2 JP S6154271B2
Authority
JP
Japan
Prior art keywords
resistance value
diaphragm
gauge
pressure
gauge resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55044216A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56140670A (en
Inventor
Tooru Shinmen
Mitsuhiko Asano
Hideaki Goshima
Hirokazu Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikura Cable Works Ltd
Original Assignee
Fujikura Cable Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Cable Works Ltd filed Critical Fujikura Cable Works Ltd
Priority to JP4421680A priority Critical patent/JPS56140670A/ja
Publication of JPS56140670A publication Critical patent/JPS56140670A/ja
Publication of JPS6154271B2 publication Critical patent/JPS6154271B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
JP4421680A 1980-04-04 1980-04-04 Semiconductor pressure sensor Granted JPS56140670A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4421680A JPS56140670A (en) 1980-04-04 1980-04-04 Semiconductor pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4421680A JPS56140670A (en) 1980-04-04 1980-04-04 Semiconductor pressure sensor

Publications (2)

Publication Number Publication Date
JPS56140670A JPS56140670A (en) 1981-11-04
JPS6154271B2 true JPS6154271B2 (cg-RX-API-DMAC7.html) 1986-11-21

Family

ID=12685341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4421680A Granted JPS56140670A (en) 1980-04-04 1980-04-04 Semiconductor pressure sensor

Country Status (1)

Country Link
JP (1) JPS56140670A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0750789B2 (ja) * 1986-07-18 1995-05-31 日産自動車株式会社 半導体圧力変換装置の製造方法

Also Published As

Publication number Publication date
JPS56140670A (en) 1981-11-04

Similar Documents

Publication Publication Date Title
US4320664A (en) Thermally compensated silicon pressure sensor
US3697918A (en) Silicon diaphragm pressure sensor having improved configuration of integral strain gage elements
US3772628A (en) Integral silicon diaphragms for low pressure measurements
US4911016A (en) Semiconductor strain gauge bridge circuit
US4530244A (en) Semiconductor pressure transducer
US5291788A (en) Semiconductor pressure sensor
JPS60128673A (ja) 半導体感圧装置
US6700473B2 (en) Pressure transducer employing on-chip resistor compensation
EP0083496B1 (en) Semiconductor pressure transducer
JPH038482B2 (cg-RX-API-DMAC7.html)
US3956927A (en) Strain gauge transducer apparatus
US5092177A (en) Device for measuring the deformations of a diaphragm
EP0006740A1 (en) Improvements in strain gauges
US4809536A (en) Method of adjusting bridge circuit of semiconductor pressure sensor
US3329023A (en) Semiconductor strain gage transducers
US20100199775A1 (en) Method for temperature compensation of a piezoresistive gaged metal diaphragm
GB1248087A (en) Improvements relating to pressure gauges
JPH01197621A (ja) デュアルサイド形圧力センサ
CN216899365U (zh) 压力传感结构及压力传感器
JPS6154271B2 (cg-RX-API-DMAC7.html)
JPH0748565B2 (ja) 半導体圧力センサ
JPS6313357B2 (cg-RX-API-DMAC7.html)
JPS6222272B2 (cg-RX-API-DMAC7.html)
JP2864700B2 (ja) 半導体圧力センサ及びその製造方法
JPH0455542B2 (cg-RX-API-DMAC7.html)