JPS56130376A - Heat-sensitive recording head - Google Patents
Heat-sensitive recording headInfo
- Publication number
- JPS56130376A JPS56130376A JP3403680A JP3403680A JPS56130376A JP S56130376 A JPS56130376 A JP S56130376A JP 3403680 A JP3403680 A JP 3403680A JP 3403680 A JP3403680 A JP 3403680A JP S56130376 A JPS56130376 A JP S56130376A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- resistor
- metal film
- heating resistor
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent deterioration of the head and enable high-speed driving of the head by a method wherein a thin film of Al, Cr or the like is provided between a heating resistor and a protective layer so as to constitute an oxygen barrier layer, and an insulating material is provided between the resistor and electrodes for wiring to enhance oxidation-resisting performance.
CONSTITUTION: The heating resistor 3 is produced on a glazed-galss coated alumina substrate 1 by reactive sputtering, an NiCr film for bonding is provided on the resistor 3 by vacuum deposition, and Al for wiring is vacuum-deposited on the NiCr layer. Then, conductors 8 for wiring and the heating resistor regions are provided by photoetching, an insulating layer 6 is provided, and a metal film (Al or Cr) 7 is vacuum-deposited. The metal film 7 is coated with Ta2O5 which serves as the protective layer 5. Whether the metal film 7 consists of Al or Cr, the heat- sensitive recording head having a reduced rate of change of resistance with a high impressed power can be obtained.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3403680A JPS56130376A (en) | 1980-03-19 | 1980-03-19 | Heat-sensitive recording head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3403680A JPS56130376A (en) | 1980-03-19 | 1980-03-19 | Heat-sensitive recording head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56130376A true JPS56130376A (en) | 1981-10-13 |
Family
ID=12403098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3403680A Pending JPS56130376A (en) | 1980-03-19 | 1980-03-19 | Heat-sensitive recording head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56130376A (en) |
-
1980
- 1980-03-19 JP JP3403680A patent/JPS56130376A/en active Pending
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