JPS56130376A - Heat-sensitive recording head - Google Patents

Heat-sensitive recording head

Info

Publication number
JPS56130376A
JPS56130376A JP3403680A JP3403680A JPS56130376A JP S56130376 A JPS56130376 A JP S56130376A JP 3403680 A JP3403680 A JP 3403680A JP 3403680 A JP3403680 A JP 3403680A JP S56130376 A JPS56130376 A JP S56130376A
Authority
JP
Japan
Prior art keywords
wiring
resistor
metal film
heating resistor
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3403680A
Other languages
Japanese (ja)
Inventor
Masao Mitani
Tsuneaki Kamei
Hirosuke Kurihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3403680A priority Critical patent/JPS56130376A/en
Publication of JPS56130376A publication Critical patent/JPS56130376A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent deterioration of the head and enable high-speed driving of the head by a method wherein a thin film of Al, Cr or the like is provided between a heating resistor and a protective layer so as to constitute an oxygen barrier layer, and an insulating material is provided between the resistor and electrodes for wiring to enhance oxidation-resisting performance.
CONSTITUTION: The heating resistor 3 is produced on a glazed-galss coated alumina substrate 1 by reactive sputtering, an NiCr film for bonding is provided on the resistor 3 by vacuum deposition, and Al for wiring is vacuum-deposited on the NiCr layer. Then, conductors 8 for wiring and the heating resistor regions are provided by photoetching, an insulating layer 6 is provided, and a metal film (Al or Cr) 7 is vacuum-deposited. The metal film 7 is coated with Ta2O5 which serves as the protective layer 5. Whether the metal film 7 consists of Al or Cr, the heat- sensitive recording head having a reduced rate of change of resistance with a high impressed power can be obtained.
COPYRIGHT: (C)1981,JPO&Japio
JP3403680A 1980-03-19 1980-03-19 Heat-sensitive recording head Pending JPS56130376A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3403680A JPS56130376A (en) 1980-03-19 1980-03-19 Heat-sensitive recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3403680A JPS56130376A (en) 1980-03-19 1980-03-19 Heat-sensitive recording head

Publications (1)

Publication Number Publication Date
JPS56130376A true JPS56130376A (en) 1981-10-13

Family

ID=12403098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3403680A Pending JPS56130376A (en) 1980-03-19 1980-03-19 Heat-sensitive recording head

Country Status (1)

Country Link
JP (1) JPS56130376A (en)

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