JPS56130375A - Heat-sensitive recording head - Google Patents
Heat-sensitive recording headInfo
- Publication number
- JPS56130375A JPS56130375A JP3403580A JP3403580A JPS56130375A JP S56130375 A JPS56130375 A JP S56130375A JP 3403580 A JP3403580 A JP 3403580A JP 3403580 A JP3403580 A JP 3403580A JP S56130375 A JPS56130375 A JP S56130375A
- Authority
- JP
- Japan
- Prior art keywords
- film
- heating
- thermal oxidation
- electrode
- recording head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electronic Switches (AREA)
Abstract
PURPOSE: To provide the heat-sensitive recording head capable of preventing deterioration and of being driven at high speeds by a method wherein the surfaces of heating resistors are artificially pre-oxidized by heating so as to enhance the oxidation-resisting performance thereof.
CONSTITUTION: The surfaces of the heating resistors 3 and of electrode layers 8 are oxidized by heating to produce oxide layers 6, 7 respectively, and are laminated on an aluminum base plate 1 coated with glazed glass 2. For example, a heating resistor film 3 such as a Ta2N film is formed by reactive sputtering, an NiCr film for adhesion is formed on the film 3 by vacuum deposition, then an electrode film such as an Al film is formed by vacuum deposition and the conductor layer 8 for wiring and the heating resistor regions are produced by photoetching. The thermal oxidation is conducted in thermal oxidation conditions intenser than the spontaneously generated thermal oxidation conditions, whereby an oxide film (Ta2O5) is formed to a depth of 800W1,000Å from the surface of Ta2N and an oxide film 7 is provided for the electrode layer 8. After the thermal oxidation is completed, Ta2O5 is coated in a thickness of 5μm to obtain a protective layer 5.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3403580A JPS56130375A (en) | 1980-03-19 | 1980-03-19 | Heat-sensitive recording head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3403580A JPS56130375A (en) | 1980-03-19 | 1980-03-19 | Heat-sensitive recording head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56130375A true JPS56130375A (en) | 1981-10-13 |
Family
ID=12403073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3403580A Pending JPS56130375A (en) | 1980-03-19 | 1980-03-19 | Heat-sensitive recording head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56130375A (en) |
-
1980
- 1980-03-19 JP JP3403580A patent/JPS56130375A/en active Pending
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