JPS56130375A - Heat-sensitive recording head - Google Patents

Heat-sensitive recording head

Info

Publication number
JPS56130375A
JPS56130375A JP3403580A JP3403580A JPS56130375A JP S56130375 A JPS56130375 A JP S56130375A JP 3403580 A JP3403580 A JP 3403580A JP 3403580 A JP3403580 A JP 3403580A JP S56130375 A JPS56130375 A JP S56130375A
Authority
JP
Japan
Prior art keywords
film
heating
thermal oxidation
electrode
recording head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3403580A
Other languages
Japanese (ja)
Inventor
Masao Mitani
Tsuneaki Kamei
Hirosuke Kurihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3403580A priority Critical patent/JPS56130375A/en
Publication of JPS56130375A publication Critical patent/JPS56130375A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To provide the heat-sensitive recording head capable of preventing deterioration and of being driven at high speeds by a method wherein the surfaces of heating resistors are artificially pre-oxidized by heating so as to enhance the oxidation-resisting performance thereof.
CONSTITUTION: The surfaces of the heating resistors 3 and of electrode layers 8 are oxidized by heating to produce oxide layers 6, 7 respectively, and are laminated on an aluminum base plate 1 coated with glazed glass 2. For example, a heating resistor film 3 such as a Ta2N film is formed by reactive sputtering, an NiCr film for adhesion is formed on the film 3 by vacuum deposition, then an electrode film such as an Al film is formed by vacuum deposition and the conductor layer 8 for wiring and the heating resistor regions are produced by photoetching. The thermal oxidation is conducted in thermal oxidation conditions intenser than the spontaneously generated thermal oxidation conditions, whereby an oxide film (Ta2O5) is formed to a depth of 800W1,000Å from the surface of Ta2N and an oxide film 7 is provided for the electrode layer 8. After the thermal oxidation is completed, Ta2O5 is coated in a thickness of 5μm to obtain a protective layer 5.
COPYRIGHT: (C)1981,JPO&Japio
JP3403580A 1980-03-19 1980-03-19 Heat-sensitive recording head Pending JPS56130375A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3403580A JPS56130375A (en) 1980-03-19 1980-03-19 Heat-sensitive recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3403580A JPS56130375A (en) 1980-03-19 1980-03-19 Heat-sensitive recording head

Publications (1)

Publication Number Publication Date
JPS56130375A true JPS56130375A (en) 1981-10-13

Family

ID=12403073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3403580A Pending JPS56130375A (en) 1980-03-19 1980-03-19 Heat-sensitive recording head

Country Status (1)

Country Link
JP (1) JPS56130375A (en)

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