JPS54126554A - Thin film type thermal head - Google Patents
Thin film type thermal headInfo
- Publication number
- JPS54126554A JPS54126554A JP3445678A JP3445678A JPS54126554A JP S54126554 A JPS54126554 A JP S54126554A JP 3445678 A JP3445678 A JP 3445678A JP 3445678 A JP3445678 A JP 3445678A JP S54126554 A JPS54126554 A JP S54126554A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- resistors
- thin film
- thermal head
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electronic Switches (AREA)
Abstract
PURPOSE: To form a thin film type thermal head of superior thermal impact resistance by disposing resistors and bonding conductors spacially so as not to mutually overlap on an insulation substrate and connecting both by means of wiring conductors.
CONSTITUTION: The thin film thermal head is obtained by evaporating Si-Ta resistors 4 in stripe form through the use of a mask 9 on the glazed layer 5 on a substrate 6 of Al2O3, then a wiring conductor layer 7 composed of Al-Ti alloy and a conductor film (Ni film, Au film or the like) 8 for Au plating over the entire surface thereon, further laminating Au electrodes 2 in stripe form through photoetching, thence selectively etching away the Au electrodes 2 wider than the stripe patterns of the resistor 4, selectively etching the Al-Ti layer 7 after this to expose the resistors 4 and forming an abrasion resistance layer 1 so as to cover the resistors 4, conducor layer 7 and Au electrodes 2.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3445678A JPS54126554A (en) | 1978-03-24 | 1978-03-24 | Thin film type thermal head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3445678A JPS54126554A (en) | 1978-03-24 | 1978-03-24 | Thin film type thermal head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54126554A true JPS54126554A (en) | 1979-10-01 |
Family
ID=12414742
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3445678A Pending JPS54126554A (en) | 1978-03-24 | 1978-03-24 | Thin film type thermal head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54126554A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5824461A (en) * | 1981-08-04 | 1983-02-14 | Rohm Co Ltd | Lead wire forming method of thermal printer head |
JPS5959474A (en) * | 1982-09-30 | 1984-04-05 | Toshiba Corp | Thin film thermal head |
JPS5959473A (en) * | 1982-09-30 | 1984-04-05 | Toshiba Corp | Manufacture of thin film thermal head |
JPS6143050U (en) * | 1985-07-17 | 1986-03-20 | 株式会社日立製作所 | thermal head |
-
1978
- 1978-03-24 JP JP3445678A patent/JPS54126554A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5824461A (en) * | 1981-08-04 | 1983-02-14 | Rohm Co Ltd | Lead wire forming method of thermal printer head |
JPS5959474A (en) * | 1982-09-30 | 1984-04-05 | Toshiba Corp | Thin film thermal head |
JPS5959473A (en) * | 1982-09-30 | 1984-04-05 | Toshiba Corp | Manufacture of thin film thermal head |
JPS6143050U (en) * | 1985-07-17 | 1986-03-20 | 株式会社日立製作所 | thermal head |
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