JPS54126554A - Thin film type thermal head - Google Patents

Thin film type thermal head

Info

Publication number
JPS54126554A
JPS54126554A JP3445678A JP3445678A JPS54126554A JP S54126554 A JPS54126554 A JP S54126554A JP 3445678 A JP3445678 A JP 3445678A JP 3445678 A JP3445678 A JP 3445678A JP S54126554 A JPS54126554 A JP S54126554A
Authority
JP
Japan
Prior art keywords
layer
resistors
thin film
thermal head
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3445678A
Other languages
Japanese (ja)
Inventor
Keizaburo Kuramasu
Sumio Maekawa
Masaji Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3445678A priority Critical patent/JPS54126554A/en
Publication of JPS54126554A publication Critical patent/JPS54126554A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To form a thin film type thermal head of superior thermal impact resistance by disposing resistors and bonding conductors spacially so as not to mutually overlap on an insulation substrate and connecting both by means of wiring conductors.
CONSTITUTION: The thin film thermal head is obtained by evaporating Si-Ta resistors 4 in stripe form through the use of a mask 9 on the glazed layer 5 on a substrate 6 of Al2O3, then a wiring conductor layer 7 composed of Al-Ti alloy and a conductor film (Ni film, Au film or the like) 8 for Au plating over the entire surface thereon, further laminating Au electrodes 2 in stripe form through photoetching, thence selectively etching away the Au electrodes 2 wider than the stripe patterns of the resistor 4, selectively etching the Al-Ti layer 7 after this to expose the resistors 4 and forming an abrasion resistance layer 1 so as to cover the resistors 4, conducor layer 7 and Au electrodes 2.
COPYRIGHT: (C)1979,JPO&Japio
JP3445678A 1978-03-24 1978-03-24 Thin film type thermal head Pending JPS54126554A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3445678A JPS54126554A (en) 1978-03-24 1978-03-24 Thin film type thermal head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3445678A JPS54126554A (en) 1978-03-24 1978-03-24 Thin film type thermal head

Publications (1)

Publication Number Publication Date
JPS54126554A true JPS54126554A (en) 1979-10-01

Family

ID=12414742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3445678A Pending JPS54126554A (en) 1978-03-24 1978-03-24 Thin film type thermal head

Country Status (1)

Country Link
JP (1) JPS54126554A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5824461A (en) * 1981-08-04 1983-02-14 Rohm Co Ltd Lead wire forming method of thermal printer head
JPS5959474A (en) * 1982-09-30 1984-04-05 Toshiba Corp Thin film thermal head
JPS5959473A (en) * 1982-09-30 1984-04-05 Toshiba Corp Manufacture of thin film thermal head
JPS6143050U (en) * 1985-07-17 1986-03-20 株式会社日立製作所 thermal head

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5824461A (en) * 1981-08-04 1983-02-14 Rohm Co Ltd Lead wire forming method of thermal printer head
JPS5959474A (en) * 1982-09-30 1984-04-05 Toshiba Corp Thin film thermal head
JPS5959473A (en) * 1982-09-30 1984-04-05 Toshiba Corp Manufacture of thin film thermal head
JPS6143050U (en) * 1985-07-17 1986-03-20 株式会社日立製作所 thermal head

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