JPS5469380A - Production of display electrode substrate - Google Patents

Abstract

PURPOSE: To obtain a good display electrode substrate by forming an oxide insulating film on the surface part, at least, of the first conductive layer which is not covered with the second conductive layer.

CONSTITUTION: At first, the first conductive layer 12 is caused to adhere onto substrate 11 by evaporation of chromium, and this conductive layer 12 is formed into a desired wiring pattern by photoetching. Next, the second conductive layer 13, for example, a gold evaporation film which is more difficult to be oxidized than conductive layer 12 is so provided that a part of the surface of conductive layer 12 subjected to pattering may be covered with conductive layer 13 and may be connected to conductive layer 13 electrically. Next, the whole of substrate 11 where conductive layers 12 and 13 are caused to adhere is left in an atomosphere of 450°C for 15 minutes, and oxide insulating film 14 consisting of chromium oxide is formed only on the surface which is not covered with conductive layer 13. Next, fluorescent material layer 15 consisting of Zn/ZnO is caused to adhere onto the surface of conductive layer 13 by electrodeposition, thereby forming a good display electrode substrate.

COPYRIGHT: (C)1979,JPO&Japio