JPS56110227A - Manufacture of semiconductor element with solar beam - Google Patents

Manufacture of semiconductor element with solar beam

Info

Publication number
JPS56110227A
JPS56110227A JP1231880A JP1231880A JPS56110227A JP S56110227 A JPS56110227 A JP S56110227A JP 1231880 A JP1231880 A JP 1231880A JP 1231880 A JP1231880 A JP 1231880A JP S56110227 A JPS56110227 A JP S56110227A
Authority
JP
Japan
Prior art keywords
solar beam
thermal treatment
light
constitution
converged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1231880A
Other languages
Japanese (ja)
Inventor
Keizo Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP1231880A priority Critical patent/JPS56110227A/en
Publication of JPS56110227A publication Critical patent/JPS56110227A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Recrystallisation Techniques (AREA)

Abstract

PURPOSE:To save energy and make possible thermal treatment of a large area in a single pass by conducting an output from plural light collectors to a final lens system through an optical fiber and thermally treating a semiconductor material with a converged solar beam. CONSTITUTION:A solar beam is converged by means of plural light collectors 1-5 and the light is conducted into optical fibers 11-15 through the intermediary of matching lens 6-10. Next, it is led to the final lens 21 through matching lens 16-20. Following this procedure, the solar beam is irradiated onto a semiconductor sample 23 through a reflective mirror 22 for thermal treatment. Under this constitution, a constant amount of solar beam can be irradiated onto a sample having a large area by adjusting the condition of a light collector, etc. depending on sunshine status. Consequently it is possible to perform correct thermal treatment and also save energy compared to the case when an artificial light source is employed.
JP1231880A 1980-02-04 1980-02-04 Manufacture of semiconductor element with solar beam Pending JPS56110227A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1231880A JPS56110227A (en) 1980-02-04 1980-02-04 Manufacture of semiconductor element with solar beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1231880A JPS56110227A (en) 1980-02-04 1980-02-04 Manufacture of semiconductor element with solar beam

Publications (1)

Publication Number Publication Date
JPS56110227A true JPS56110227A (en) 1981-09-01

Family

ID=11801956

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1231880A Pending JPS56110227A (en) 1980-02-04 1980-02-04 Manufacture of semiconductor element with solar beam

Country Status (1)

Country Link
JP (1) JPS56110227A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS595633A (en) * 1982-07-02 1984-01-12 Seiko Epson Corp Manufacture of semiconductor device
JPS6486517A (en) * 1988-04-15 1989-03-31 Seiko Epson Corp Manufacture of semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52124343A (en) * 1976-04-12 1977-10-19 Toyoshige Teranishi Sunbeam condensing and transmitting barrel

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52124343A (en) * 1976-04-12 1977-10-19 Toyoshige Teranishi Sunbeam condensing and transmitting barrel

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS595633A (en) * 1982-07-02 1984-01-12 Seiko Epson Corp Manufacture of semiconductor device
JPS6486517A (en) * 1988-04-15 1989-03-31 Seiko Epson Corp Manufacture of semiconductor device

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