JPS56103352A - Method for measuring impurity concentration of semiconductor - Google Patents
Method for measuring impurity concentration of semiconductorInfo
- Publication number
- JPS56103352A JPS56103352A JP602480A JP602480A JPS56103352A JP S56103352 A JPS56103352 A JP S56103352A JP 602480 A JP602480 A JP 602480A JP 602480 A JP602480 A JP 602480A JP S56103352 A JPS56103352 A JP S56103352A
- Authority
- JP
- Japan
- Prior art keywords
- absorption
- measured
- distributions
- coefficients
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
- G01N21/5907—Densitometers
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP602480A JPS56103352A (en) | 1980-01-22 | 1980-01-22 | Method for measuring impurity concentration of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP602480A JPS56103352A (en) | 1980-01-22 | 1980-01-22 | Method for measuring impurity concentration of semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56103352A true JPS56103352A (en) | 1981-08-18 |
Family
ID=11627108
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP602480A Pending JPS56103352A (en) | 1980-01-22 | 1980-01-22 | Method for measuring impurity concentration of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56103352A (ja) |
-
1980
- 1980-01-22 JP JP602480A patent/JPS56103352A/ja active Pending
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