JPS5595366A - Insulated-gate field-effect transistor - Google Patents
Insulated-gate field-effect transistorInfo
- Publication number
- JPS5595366A JPS5595366A JP261079A JP261079A JPS5595366A JP S5595366 A JPS5595366 A JP S5595366A JP 261079 A JP261079 A JP 261079A JP 261079 A JP261079 A JP 261079A JP S5595366 A JPS5595366 A JP S5595366A
- Authority
- JP
- Japan
- Prior art keywords
- depression
- gate
- polycrystalline
- film
- wall surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005669 field effect Effects 0.000 title 1
- 239000012535 impurity Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 230000009977 dual effect Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP261079A JPS5595366A (en) | 1979-01-13 | 1979-01-13 | Insulated-gate field-effect transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP261079A JPS5595366A (en) | 1979-01-13 | 1979-01-13 | Insulated-gate field-effect transistor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5595366A true JPS5595366A (en) | 1980-07-19 |
JPS6159543B2 JPS6159543B2 (enrdf_load_html_response) | 1986-12-17 |
Family
ID=11534157
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP261079A Granted JPS5595366A (en) | 1979-01-13 | 1979-01-13 | Insulated-gate field-effect transistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5595366A (enrdf_load_html_response) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4326332A (en) * | 1980-07-28 | 1982-04-27 | International Business Machines Corp. | Method of making a high density V-MOS memory array |
US4571512A (en) * | 1982-06-21 | 1986-02-18 | Eaton Corporation | Lateral bidirectional shielded notch FET |
US4622569A (en) * | 1984-06-08 | 1986-11-11 | Eaton Corporation | Lateral bidirectional power FET with notched multi-channel stacking and with dual gate reference terminal means |
US4754310A (en) * | 1980-12-10 | 1988-06-28 | U.S. Philips Corp. | High voltage semiconductor device |
US5204281A (en) * | 1990-09-04 | 1993-04-20 | Motorola, Inc. | Method of making dynamic random access memory cell having a trench capacitor |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0287751U (enrdf_load_html_response) * | 1988-12-21 | 1990-07-11 |
-
1979
- 1979-01-13 JP JP261079A patent/JPS5595366A/ja active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4326332A (en) * | 1980-07-28 | 1982-04-27 | International Business Machines Corp. | Method of making a high density V-MOS memory array |
US4754310A (en) * | 1980-12-10 | 1988-06-28 | U.S. Philips Corp. | High voltage semiconductor device |
US4571512A (en) * | 1982-06-21 | 1986-02-18 | Eaton Corporation | Lateral bidirectional shielded notch FET |
US4622569A (en) * | 1984-06-08 | 1986-11-11 | Eaton Corporation | Lateral bidirectional power FET with notched multi-channel stacking and with dual gate reference terminal means |
US5204281A (en) * | 1990-09-04 | 1993-04-20 | Motorola, Inc. | Method of making dynamic random access memory cell having a trench capacitor |
Also Published As
Publication number | Publication date |
---|---|
JPS6159543B2 (enrdf_load_html_response) | 1986-12-17 |
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