JPS5588335A - Automatic conveying mechanism for plasma etching/ stripping device - Google Patents

Automatic conveying mechanism for plasma etching/ stripping device

Info

Publication number
JPS5588335A
JPS5588335A JP15179178A JP15179178A JPS5588335A JP S5588335 A JPS5588335 A JP S5588335A JP 15179178 A JP15179178 A JP 15179178A JP 15179178 A JP15179178 A JP 15179178A JP S5588335 A JPS5588335 A JP S5588335A
Authority
JP
Japan
Prior art keywords
decompression
chamber
stand
wafer
conveyer plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15179178A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5653852B2 (enrdf_load_html_response
Inventor
Hitoshi Ogi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP15179178A priority Critical patent/JPS5588335A/ja
Publication of JPS5588335A publication Critical patent/JPS5588335A/ja
Publication of JPS5653852B2 publication Critical patent/JPS5653852B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP15179178A 1978-12-07 1978-12-07 Automatic conveying mechanism for plasma etching/ stripping device Granted JPS5588335A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15179178A JPS5588335A (en) 1978-12-07 1978-12-07 Automatic conveying mechanism for plasma etching/ stripping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15179178A JPS5588335A (en) 1978-12-07 1978-12-07 Automatic conveying mechanism for plasma etching/ stripping device

Publications (2)

Publication Number Publication Date
JPS5588335A true JPS5588335A (en) 1980-07-04
JPS5653852B2 JPS5653852B2 (enrdf_load_html_response) 1981-12-22

Family

ID=15526363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15179178A Granted JPS5588335A (en) 1978-12-07 1978-12-07 Automatic conveying mechanism for plasma etching/ stripping device

Country Status (1)

Country Link
JP (1) JPS5588335A (enrdf_load_html_response)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766641A (en) * 1980-10-09 1982-04-22 Mitsubishi Electric Corp Plasma etching
JPS57128928A (en) * 1980-12-22 1982-08-10 Perkin Elmer Corp Device for pretreating, etching and stripping silicon wafer
JPS5966121A (ja) * 1982-10-08 1984-04-14 Hitachi Ltd 反応室の大気開放方法
JPS6039240U (ja) * 1983-08-24 1985-03-19 ウシオ電機株式会社 紫外線洗浄装置
JPS61271836A (ja) * 1985-05-28 1986-12-02 Ulvac Corp ドライエツチング装置
JPH0332U (enrdf_load_html_response) * 1990-05-25 1991-01-07

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873661U (ja) * 1981-11-13 1983-05-18 クラリオン株式会社 インタ−ホン
JPS5967063U (ja) * 1982-10-26 1984-05-07 シャープ株式会社 インタ−ホン
JPS635752U (enrdf_load_html_response) * 1986-06-26 1988-01-14

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51106218U (enrdf_load_html_response) * 1975-02-24 1976-08-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51106218U (enrdf_load_html_response) * 1975-02-24 1976-08-25

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5766641A (en) * 1980-10-09 1982-04-22 Mitsubishi Electric Corp Plasma etching
JPS57128928A (en) * 1980-12-22 1982-08-10 Perkin Elmer Corp Device for pretreating, etching and stripping silicon wafer
JPS5966121A (ja) * 1982-10-08 1984-04-14 Hitachi Ltd 反応室の大気開放方法
JPS6039240U (ja) * 1983-08-24 1985-03-19 ウシオ電機株式会社 紫外線洗浄装置
JPS61271836A (ja) * 1985-05-28 1986-12-02 Ulvac Corp ドライエツチング装置
JPH0332U (enrdf_load_html_response) * 1990-05-25 1991-01-07

Also Published As

Publication number Publication date
JPS5653852B2 (enrdf_load_html_response) 1981-12-22

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