JPS5587902A - Dimension measuring device - Google Patents

Dimension measuring device

Info

Publication number
JPS5587902A
JPS5587902A JP16004378A JP16004378A JPS5587902A JP S5587902 A JPS5587902 A JP S5587902A JP 16004378 A JP16004378 A JP 16004378A JP 16004378 A JP16004378 A JP 16004378A JP S5587902 A JPS5587902 A JP S5587902A
Authority
JP
Japan
Prior art keywords
axis
pattern
stage
mask
clear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16004378A
Other languages
English (en)
Inventor
Tadao Nakakuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16004378A priority Critical patent/JPS5587902A/ja
Publication of JPS5587902A publication Critical patent/JPS5587902A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP16004378A 1978-12-27 1978-12-27 Dimension measuring device Pending JPS5587902A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16004378A JPS5587902A (en) 1978-12-27 1978-12-27 Dimension measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16004378A JPS5587902A (en) 1978-12-27 1978-12-27 Dimension measuring device

Publications (1)

Publication Number Publication Date
JPS5587902A true JPS5587902A (en) 1980-07-03

Family

ID=15706684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16004378A Pending JPS5587902A (en) 1978-12-27 1978-12-27 Dimension measuring device

Country Status (1)

Country Link
JP (1) JPS5587902A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4568188A (en) * 1982-04-08 1986-02-04 Carl-Zeiss Stiftung, Heidenheim/Brenz Microscope photometer
JPS63257478A (ja) * 1987-04-15 1988-10-25 Hitachi Ltd 表面波アクチユエ−タ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4568188A (en) * 1982-04-08 1986-02-04 Carl-Zeiss Stiftung, Heidenheim/Brenz Microscope photometer
JPS63257478A (ja) * 1987-04-15 1988-10-25 Hitachi Ltd 表面波アクチユエ−タ

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