JPS558014A - Micro pattern forming method - Google Patents

Micro pattern forming method

Info

Publication number
JPS558014A
JPS558014A JP7940578A JP7940578A JPS558014A JP S558014 A JPS558014 A JP S558014A JP 7940578 A JP7940578 A JP 7940578A JP 7940578 A JP7940578 A JP 7940578A JP S558014 A JPS558014 A JP S558014A
Authority
JP
Japan
Prior art keywords
resist
exposed
light
pattern
photo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7940578A
Other languages
English (en)
Inventor
Kenji Sugishima
Kazuo Tokitomo
Satoshi Suda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7940578A priority Critical patent/JPS558014A/ja
Publication of JPS558014A publication Critical patent/JPS558014A/ja
Pending legal-status Critical Current

Links

JP7940578A 1978-06-30 1978-06-30 Micro pattern forming method Pending JPS558014A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7940578A JPS558014A (en) 1978-06-30 1978-06-30 Micro pattern forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7940578A JPS558014A (en) 1978-06-30 1978-06-30 Micro pattern forming method

Publications (1)

Publication Number Publication Date
JPS558014A true JPS558014A (en) 1980-01-21

Family

ID=13688937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7940578A Pending JPS558014A (en) 1978-06-30 1978-06-30 Micro pattern forming method

Country Status (1)

Country Link
JP (1) JPS558014A (ja)

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