JPS5577170A - Silicon mono-crystal wafer - Google Patents

Silicon mono-crystal wafer

Info

Publication number
JPS5577170A
JPS5577170A JP15011778A JP15011778A JPS5577170A JP S5577170 A JPS5577170 A JP S5577170A JP 15011778 A JP15011778 A JP 15011778A JP 15011778 A JP15011778 A JP 15011778A JP S5577170 A JPS5577170 A JP S5577170A
Authority
JP
Japan
Prior art keywords
crystal
heattreatment
temperature
defect
time
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15011778A
Other languages
English (en)
Japanese (ja)
Other versions
JPS637025B2 (enExample
Inventor
Masatake Kishino
Katsu Kanamori
Naoji Yoshihiro
Yoshiaki Matsushita
Yojiro Kondo
Kazunori Tanitsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP15011778A priority Critical patent/JPS5577170A/ja
Publication of JPS5577170A publication Critical patent/JPS5577170A/ja
Publication of JPS637025B2 publication Critical patent/JPS637025B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP15011778A 1978-12-06 1978-12-06 Silicon mono-crystal wafer Granted JPS5577170A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15011778A JPS5577170A (en) 1978-12-06 1978-12-06 Silicon mono-crystal wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15011778A JPS5577170A (en) 1978-12-06 1978-12-06 Silicon mono-crystal wafer

Publications (2)

Publication Number Publication Date
JPS5577170A true JPS5577170A (en) 1980-06-10
JPS637025B2 JPS637025B2 (enExample) 1988-02-15

Family

ID=15489851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15011778A Granted JPS5577170A (en) 1978-12-06 1978-12-06 Silicon mono-crystal wafer

Country Status (1)

Country Link
JP (1) JPS5577170A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856344A (ja) * 1981-09-29 1983-04-04 Fujitsu Ltd 半導体装置の製造方法
US4483736A (en) * 1981-03-24 1984-11-20 Mitsubishi Monsanto Chemical Co., Ltd. Method for producing a single crystal of a IIIb -Vb compound

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4483736A (en) * 1981-03-24 1984-11-20 Mitsubishi Monsanto Chemical Co., Ltd. Method for producing a single crystal of a IIIb -Vb compound
JPS5856344A (ja) * 1981-09-29 1983-04-04 Fujitsu Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS637025B2 (enExample) 1988-02-15

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