JPS5574538A - Photosensitive composition - Google Patents
Photosensitive compositionInfo
- Publication number
- JPS5574538A JPS5574538A JP14787278A JP14787278A JPS5574538A JP S5574538 A JPS5574538 A JP S5574538A JP 14787278 A JP14787278 A JP 14787278A JP 14787278 A JP14787278 A JP 14787278A JP S5574538 A JPS5574538 A JP S5574538A
- Authority
- JP
- Japan
- Prior art keywords
- white light
- light illumination
- cyclized
- under white
- darkroom
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14787278A JPS5574538A (en) | 1978-12-01 | 1978-12-01 | Photosensitive composition |
DE2948324A DE2948324C2 (de) | 1978-12-01 | 1979-11-30 | Lichtempfindliches Gemisch, enthaltend eine Bisazidverbindung, und Verfahren zur Bildung von Mustern |
US06/484,847 US4469778A (en) | 1978-12-01 | 1983-04-14 | Pattern formation method utilizing deep UV radiation and bisazide composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14787278A JPS5574538A (en) | 1978-12-01 | 1978-12-01 | Photosensitive composition |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26105985A Division JPS61210064A (ja) | 1985-11-22 | 1985-11-22 | ビスアジド化合物 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5574538A true JPS5574538A (en) | 1980-06-05 |
JPS6214821B2 JPS6214821B2 (ja) | 1987-04-03 |
Family
ID=15440135
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14787278A Granted JPS5574538A (en) | 1978-12-01 | 1978-12-01 | Photosensitive composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5574538A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5744143A (en) * | 1980-08-29 | 1982-03-12 | Tokyo Ohka Kogyo Co Ltd | Composition and method for forming micropattern |
JPS5940641A (ja) * | 1982-08-31 | 1984-03-06 | Toshiba Corp | 高解像度用ネガ型フオトレジスト組成物 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102319349B1 (ko) | 2020-01-09 | 2021-10-28 | 엘지전자 주식회사 | 모터 조립체 및 이를 포함하는 왕복동식 압축기 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5040010A (ja) * | 1973-07-12 | 1975-04-12 | ||
JPS5337763A (en) * | 1976-09-20 | 1978-04-07 | Asahi Dow Ltd | Injection molding machine |
-
1978
- 1978-12-01 JP JP14787278A patent/JPS5574538A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5040010A (ja) * | 1973-07-12 | 1975-04-12 | ||
JPS5337763A (en) * | 1976-09-20 | 1978-04-07 | Asahi Dow Ltd | Injection molding machine |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5744143A (en) * | 1980-08-29 | 1982-03-12 | Tokyo Ohka Kogyo Co Ltd | Composition and method for forming micropattern |
JPS6341047B2 (ja) * | 1980-08-29 | 1988-08-15 | Tokyo Oka Kogyo Kk | |
JPS5940641A (ja) * | 1982-08-31 | 1984-03-06 | Toshiba Corp | 高解像度用ネガ型フオトレジスト組成物 |
JPH0544663B2 (ja) * | 1982-08-31 | 1993-07-07 | Toshiba Kk |
Also Published As
Publication number | Publication date |
---|---|
JPS6214821B2 (ja) | 1987-04-03 |
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