JPS5572084A - Semiconductor photo-detector - Google Patents
Semiconductor photo-detectorInfo
- Publication number
- JPS5572084A JPS5572084A JP14534678A JP14534678A JPS5572084A JP S5572084 A JPS5572084 A JP S5572084A JP 14534678 A JP14534678 A JP 14534678A JP 14534678 A JP14534678 A JP 14534678A JP S5572084 A JPS5572084 A JP S5572084A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- region
- junction
- type
- photo detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000015556 catabolic process Effects 0.000 abstract 1
- 238000010276 construction Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Landscapes
- Light Receiving Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14534678A JPS5572084A (en) | 1978-11-27 | 1978-11-27 | Semiconductor photo-detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14534678A JPS5572084A (en) | 1978-11-27 | 1978-11-27 | Semiconductor photo-detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5572084A true JPS5572084A (en) | 1980-05-30 |
JPS6244431B2 JPS6244431B2 (enrdf_load_stackoverflow) | 1987-09-21 |
Family
ID=15383049
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14534678A Granted JPS5572084A (en) | 1978-11-27 | 1978-11-27 | Semiconductor photo-detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5572084A (enrdf_load_stackoverflow) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55162280A (en) * | 1979-06-01 | 1980-12-17 | Mitsubishi Electric Corp | Photodiode |
JPS57159072A (en) * | 1981-03-25 | 1982-10-01 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of avalanche photodiode |
JPS57159507U (enrdf_load_stackoverflow) * | 1981-03-30 | 1982-10-06 | ||
JPS57190370A (en) * | 1981-05-18 | 1982-11-22 | Fujitsu Ltd | Semiconductor light receiving element |
JPS57198668A (en) * | 1981-06-01 | 1982-12-06 | Fujitsu Ltd | Light receiving element |
US4481523A (en) * | 1980-12-02 | 1984-11-06 | Fujitsu Limited | Avalanche photodiodes |
US4625226A (en) * | 1983-08-18 | 1986-11-25 | Standard Telephones And Cables Public Limited Company | Photodetector |
US5053837A (en) * | 1987-09-16 | 1991-10-01 | Sumitomo Electric Industries, Ltd. | Ingaas/inp type pin photodiodes |
JPH03293780A (ja) * | 1990-04-11 | 1991-12-25 | Toshiba Corp | 半導体受光素子 |
US5132747A (en) * | 1981-09-28 | 1992-07-21 | Kokusai Denshin Denwa Kabushiki Kaisha | Avalanche photo diode |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5513957A (en) * | 1978-07-17 | 1980-01-31 | Nec Corp | Semiconductor device |
-
1978
- 1978-11-27 JP JP14534678A patent/JPS5572084A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5513957A (en) * | 1978-07-17 | 1980-01-31 | Nec Corp | Semiconductor device |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55162280A (en) * | 1979-06-01 | 1980-12-17 | Mitsubishi Electric Corp | Photodiode |
US4481523A (en) * | 1980-12-02 | 1984-11-06 | Fujitsu Limited | Avalanche photodiodes |
JPS57159072A (en) * | 1981-03-25 | 1982-10-01 | Nippon Telegr & Teleph Corp <Ntt> | Manufacture of avalanche photodiode |
JPS57159507U (enrdf_load_stackoverflow) * | 1981-03-30 | 1982-10-06 | ||
JPS57190370A (en) * | 1981-05-18 | 1982-11-22 | Fujitsu Ltd | Semiconductor light receiving element |
JPS57198668A (en) * | 1981-06-01 | 1982-12-06 | Fujitsu Ltd | Light receiving element |
US5132747A (en) * | 1981-09-28 | 1992-07-21 | Kokusai Denshin Denwa Kabushiki Kaisha | Avalanche photo diode |
US4625226A (en) * | 1983-08-18 | 1986-11-25 | Standard Telephones And Cables Public Limited Company | Photodetector |
US5053837A (en) * | 1987-09-16 | 1991-10-01 | Sumitomo Electric Industries, Ltd. | Ingaas/inp type pin photodiodes |
JPH03293780A (ja) * | 1990-04-11 | 1991-12-25 | Toshiba Corp | 半導体受光素子 |
US5157473A (en) * | 1990-04-11 | 1992-10-20 | Kabushiki Kaisha Toshiba | Avalanche photodiode having guard ring |
Also Published As
Publication number | Publication date |
---|---|
JPS6244431B2 (enrdf_load_stackoverflow) | 1987-09-21 |
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