JPS5572069A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5572069A JPS5572069A JP7298979A JP7298979A JPS5572069A JP S5572069 A JPS5572069 A JP S5572069A JP 7298979 A JP7298979 A JP 7298979A JP 7298979 A JP7298979 A JP 7298979A JP S5572069 A JPS5572069 A JP S5572069A
- Authority
- JP
- Japan
- Prior art keywords
- region
- film
- type
- sio
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 8
- 229910052681 coesite Inorganic materials 0.000 abstract 4
- 229910052906 cristobalite Inorganic materials 0.000 abstract 4
- 239000000377 silicon dioxide Substances 0.000 abstract 4
- 229910052682 stishovite Inorganic materials 0.000 abstract 4
- 229910052905 tridymite Inorganic materials 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 3
- 238000009792 diffusion process Methods 0.000 abstract 1
- 230000003068 static effect Effects 0.000 abstract 1
Landscapes
- Semiconductor Memories (AREA)
- Static Random-Access Memory (AREA)
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7298979A JPS5572069A (en) | 1979-06-12 | 1979-06-12 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7298979A JPS5572069A (en) | 1979-06-12 | 1979-06-12 | Semiconductor device |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9360885A Division JPS6134968A (ja) | 1985-05-02 | 1985-05-02 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5572069A true JPS5572069A (en) | 1980-05-30 |
| JPS6238865B2 JPS6238865B2 (enrdf_load_stackoverflow) | 1987-08-20 |
Family
ID=13505309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7298979A Granted JPS5572069A (en) | 1979-06-12 | 1979-06-12 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5572069A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60246666A (ja) * | 1984-05-22 | 1985-12-06 | Seiko Instr & Electronics Ltd | Ｍｉｓトランジスタインバ−タ− |
| US4792841A (en) * | 1980-08-15 | 1988-12-20 | Hitachi, Ltd. | Semiconductor devices and a process for producing the same |
| US4853894A (en) * | 1986-07-09 | 1989-08-01 | Hitachi, Ltd. | Static random-access memory having multilevel conductive layer |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63162280U (enrdf_load_stackoverflow) * | 1987-04-09 | 1988-10-24 |
-
1979
- 1979-06-12 JP JP7298979A patent/JPS5572069A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4792841A (en) * | 1980-08-15 | 1988-12-20 | Hitachi, Ltd. | Semiconductor devices and a process for producing the same |
| JPS60246666A (ja) * | 1984-05-22 | 1985-12-06 | Seiko Instr & Electronics Ltd | Ｍｉｓトランジスタインバ−タ− |
| US4853894A (en) * | 1986-07-09 | 1989-08-01 | Hitachi, Ltd. | Static random-access memory having multilevel conductive layer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6238865B2 (enrdf_load_stackoverflow) | 1987-08-20 |
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