JPS5570059A - Semiconductor memory device - Google Patents
Semiconductor memory deviceInfo
- Publication number
- JPS5570059A JPS5570059A JP14444478A JP14444478A JPS5570059A JP S5570059 A JPS5570059 A JP S5570059A JP 14444478 A JP14444478 A JP 14444478A JP 14444478 A JP14444478 A JP 14444478A JP S5570059 A JPS5570059 A JP S5570059A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- poly
- condenser
- dummy
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 8
- 229910052681 coesite Inorganic materials 0.000 abstract 4
- 229910052906 cristobalite Inorganic materials 0.000 abstract 4
- 239000000377 silicon dioxide Substances 0.000 abstract 4
- 235000012239 silicon dioxide Nutrition 0.000 abstract 4
- 229910052682 stishovite Inorganic materials 0.000 abstract 4
- 229910052905 tridymite Inorganic materials 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
Landscapes
- Semiconductor Memories (AREA)
Abstract
PURPOSE:To eliminate the unbalance of the reading of 0 and 1, by forming a one transistor-dynamic RAM by means of two layer poly Si, by making up a one layer portion as a condenser electrode and a two layer portion as a gate electrode in a memory and by turning the layer portions the other way in dummy. CONSTITUTION:In a memory cell of a 1MIST+IC dynamic RAM, an n-type bit wire 13 is mounted to a p<->-type substrate 11, the first layer poly Si15 is installed through a thin SiO2 film 14' and used as a condenser electrode and the second layer poly Si16 is disposed onto a SiO2 film 14'' and employed as a gate electrode. In a dummy cell, meanwhile, a n-type bit wire 33 is mounted to a p<->-type substrate 31, the first layer poly Si35, 35' are installed through thin SiO2 films 34'', 34''' and used as gate electrodes and the second poly Si36 is disposed through a SiO2 film 34' and employed as a condenser electrode. Thus, the dummy condenser is easily formed, and the information of 0 and 1 memorized in the memory cell can stably be sensed and can be amplified.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14444478A JPS5570059A (en) | 1978-11-20 | 1978-11-20 | Semiconductor memory device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14444478A JPS5570059A (en) | 1978-11-20 | 1978-11-20 | Semiconductor memory device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5570059A true JPS5570059A (en) | 1980-05-27 |
Family
ID=15362355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14444478A Pending JPS5570059A (en) | 1978-11-20 | 1978-11-20 | Semiconductor memory device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5570059A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS595662A (en) * | 1982-07-01 | 1984-01-12 | Nec Corp | Semiconductor device |
-
1978
- 1978-11-20 JP JP14444478A patent/JPS5570059A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS595662A (en) * | 1982-07-01 | 1984-01-12 | Nec Corp | Semiconductor device |
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