JPS5568610A - Preparing magnetic bubble memory element - Google Patents

Preparing magnetic bubble memory element

Info

Publication number
JPS5568610A
JPS5568610A JP14237278A JP14237278A JPS5568610A JP S5568610 A JPS5568610 A JP S5568610A JP 14237278 A JP14237278 A JP 14237278A JP 14237278 A JP14237278 A JP 14237278A JP S5568610 A JPS5568610 A JP S5568610A
Authority
JP
Japan
Prior art keywords
film
mask
permalloy
patterns
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14237278A
Other languages
Japanese (ja)
Other versions
JPS6217367B2 (en
Inventor
Hiroshi Umezaki
Hideki Nishida
Norikazu Tsumita
Koji Yamada
Katsuhiro Kaneko
Yoshitsugu Koiso
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14237278A priority Critical patent/JPS5568610A/en
Publication of JPS5568610A publication Critical patent/JPS5568610A/en
Publication of JPS6217367B2 publication Critical patent/JPS6217367B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To provide precisely defined conductor and permalloy patterns by using a mask having different light transmittance for ultraviolet and X rays to perform irradiation with different strength, and then follwed by chemical and physical etchings. CONSTITUTION:The substrate 1 having a magnetic garnet layer is applied in sequence with deposited layers of a first insulating film 2, a conductor film 3, a second insulating film 4, a permalloy film 5, a mask film 6, and a resist film. The resist film is irradiated with light locally different in strength through a mask having locally different light transmittance. The resist is then developed to provide resist patterns 7, 8. The patterns 7, 8 are used as a mask to allow the exposed parts of the permalloy film 5 to be removed by etching. Next, eaching of the exposed parts of the mask film 6 and the second insulating film 4 is removed by etching by use of Freon gas plasma. In this manner, precisely defined conductor and permalloy patterns are provided.
JP14237278A 1978-11-20 1978-11-20 Preparing magnetic bubble memory element Granted JPS5568610A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14237278A JPS5568610A (en) 1978-11-20 1978-11-20 Preparing magnetic bubble memory element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14237278A JPS5568610A (en) 1978-11-20 1978-11-20 Preparing magnetic bubble memory element

Publications (2)

Publication Number Publication Date
JPS5568610A true JPS5568610A (en) 1980-05-23
JPS6217367B2 JPS6217367B2 (en) 1987-04-17

Family

ID=15313843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14237278A Granted JPS5568610A (en) 1978-11-20 1978-11-20 Preparing magnetic bubble memory element

Country Status (1)

Country Link
JP (1) JPS5568610A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51110930A (en) * 1975-03-05 1976-09-30 Ibm Bishodenshisochi noseizohoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51110930A (en) * 1975-03-05 1976-09-30 Ibm Bishodenshisochi noseizohoho

Also Published As

Publication number Publication date
JPS6217367B2 (en) 1987-04-17

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