JPS5565443A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5565443A JPS5565443A JP13961578A JP13961578A JPS5565443A JP S5565443 A JPS5565443 A JP S5565443A JP 13961578 A JP13961578 A JP 13961578A JP 13961578 A JP13961578 A JP 13961578A JP S5565443 A JPS5565443 A JP S5565443A
- Authority
- JP
- Japan
- Prior art keywords
- bonding unit
- stem
- heating device
- heating
- infrared ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/85009—Pre-treatment of the connector or the bonding area
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13961578A JPS5565443A (en) | 1978-11-10 | 1978-11-10 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13961578A JPS5565443A (en) | 1978-11-10 | 1978-11-10 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5565443A true JPS5565443A (en) | 1980-05-16 |
Family
ID=15249409
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13961578A Pending JPS5565443A (en) | 1978-11-10 | 1978-11-10 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5565443A (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4356384A (en) * | 1980-03-03 | 1982-10-26 | Arnon Gat | Method and means for heat treating semiconductor material using high intensity CW lamps |
JPS59172733A (ja) * | 1983-03-22 | 1984-09-29 | Toshiba Corp | 半導体装置の製造方法 |
JPS6022328A (ja) * | 1983-07-18 | 1985-02-04 | Yamagata Nippon Denki Kk | 半導体装置の製造方法 |
JPS6167926A (ja) * | 1984-09-12 | 1986-04-08 | Hitachi Tokyo Electronics Co Ltd | ボンデイング方法 |
JPH03116741A (ja) * | 1989-09-28 | 1991-05-17 | Nippon Steel Corp | 半導体のボンディング方法 |
US6384366B1 (en) * | 2000-06-12 | 2002-05-07 | Advanced Micro Devices, Inc. | Top infrared heating for bonding operations |
US8444044B2 (en) | 2008-03-10 | 2013-05-21 | Micron Technology, Inc. | Apparatus and methods for forming wire bonds |
-
1978
- 1978-11-10 JP JP13961578A patent/JPS5565443A/ja active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4356384A (en) * | 1980-03-03 | 1982-10-26 | Arnon Gat | Method and means for heat treating semiconductor material using high intensity CW lamps |
JPS59172733A (ja) * | 1983-03-22 | 1984-09-29 | Toshiba Corp | 半導体装置の製造方法 |
JPS6022328A (ja) * | 1983-07-18 | 1985-02-04 | Yamagata Nippon Denki Kk | 半導体装置の製造方法 |
JPH0218583B2 (ja) * | 1983-07-18 | 1990-04-26 | Yamagata Nippon Denki Kk | |
JPS6167926A (ja) * | 1984-09-12 | 1986-04-08 | Hitachi Tokyo Electronics Co Ltd | ボンデイング方法 |
JPH03116741A (ja) * | 1989-09-28 | 1991-05-17 | Nippon Steel Corp | 半導体のボンディング方法 |
US6384366B1 (en) * | 2000-06-12 | 2002-05-07 | Advanced Micro Devices, Inc. | Top infrared heating for bonding operations |
US8444044B2 (en) | 2008-03-10 | 2013-05-21 | Micron Technology, Inc. | Apparatus and methods for forming wire bonds |
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