JPS5559718A - Producing method of semiconductor unit - Google Patents

Producing method of semiconductor unit

Info

Publication number
JPS5559718A
JPS5559718A JP13151578A JP13151578A JPS5559718A JP S5559718 A JPS5559718 A JP S5559718A JP 13151578 A JP13151578 A JP 13151578A JP 13151578 A JP13151578 A JP 13151578A JP S5559718 A JPS5559718 A JP S5559718A
Authority
JP
Japan
Prior art keywords
photosensitive resin
low temperature
plasma treatment
temperature gas
electric properties
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13151578A
Other languages
English (en)
Other versions
JPS58178B2 (ja
Inventor
Takayuki Wakui
Yasuhiro Mochizuki
Yutaka Misawa
Komei Yatsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13151578A priority Critical patent/JPS58178B2/ja
Publication of JPS5559718A publication Critical patent/JPS5559718A/ja
Publication of JPS58178B2 publication Critical patent/JPS58178B2/ja
Expired legal-status Critical Current

Links

JP13151578A 1978-10-27 1978-10-27 半導体装置の製造方法 Expired JPS58178B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13151578A JPS58178B2 (ja) 1978-10-27 1978-10-27 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13151578A JPS58178B2 (ja) 1978-10-27 1978-10-27 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5559718A true JPS5559718A (en) 1980-05-06
JPS58178B2 JPS58178B2 (ja) 1983-01-05

Family

ID=15059837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13151578A Expired JPS58178B2 (ja) 1978-10-27 1978-10-27 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58178B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0290624A (ja) * 1988-09-28 1990-03-30 Hitachi Ltd 半導体集積回路装置の製造方法
JPH0510939U (ja) * 1991-07-24 1993-02-12 前田建設工業株式会社 空調装置
JP2019008942A (ja) * 2017-06-22 2019-01-17 住友化学株式会社 透明電極の製造方法及び電子デバイスの製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0290624A (ja) * 1988-09-28 1990-03-30 Hitachi Ltd 半導体集積回路装置の製造方法
JPH0510939U (ja) * 1991-07-24 1993-02-12 前田建設工業株式会社 空調装置
JP2019008942A (ja) * 2017-06-22 2019-01-17 住友化学株式会社 透明電極の製造方法及び電子デバイスの製造方法

Also Published As

Publication number Publication date
JPS58178B2 (ja) 1983-01-05

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