JPS5559718A - Producing method of semiconductor unit - Google Patents
Producing method of semiconductor unitInfo
- Publication number
- JPS5559718A JPS5559718A JP13151578A JP13151578A JPS5559718A JP S5559718 A JPS5559718 A JP S5559718A JP 13151578 A JP13151578 A JP 13151578A JP 13151578 A JP13151578 A JP 13151578A JP S5559718 A JPS5559718 A JP S5559718A
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive resin
- low temperature
- plasma treatment
- temperature gas
- electric properties
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13151578A JPS58178B2 (ja) | 1978-10-27 | 1978-10-27 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13151578A JPS58178B2 (ja) | 1978-10-27 | 1978-10-27 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5559718A true JPS5559718A (en) | 1980-05-06 |
JPS58178B2 JPS58178B2 (ja) | 1983-01-05 |
Family
ID=15059837
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13151578A Expired JPS58178B2 (ja) | 1978-10-27 | 1978-10-27 | 半導体装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58178B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0290624A (ja) * | 1988-09-28 | 1990-03-30 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
JPH0510939U (ja) * | 1991-07-24 | 1993-02-12 | 前田建設工業株式会社 | 空調装置 |
JP2019008942A (ja) * | 2017-06-22 | 2019-01-17 | 住友化学株式会社 | 透明電極の製造方法及び電子デバイスの製造方法 |
-
1978
- 1978-10-27 JP JP13151578A patent/JPS58178B2/ja not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0290624A (ja) * | 1988-09-28 | 1990-03-30 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
JPH0510939U (ja) * | 1991-07-24 | 1993-02-12 | 前田建設工業株式会社 | 空調装置 |
JP2019008942A (ja) * | 2017-06-22 | 2019-01-17 | 住友化学株式会社 | 透明電極の製造方法及び電子デバイスの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS58178B2 (ja) | 1983-01-05 |
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