JPS5546522A - Method of manufacturing semiconductor device - Google Patents
Method of manufacturing semiconductor deviceInfo
- Publication number
- JPS5546522A JPS5546522A JP11921378A JP11921378A JPS5546522A JP S5546522 A JPS5546522 A JP S5546522A JP 11921378 A JP11921378 A JP 11921378A JP 11921378 A JP11921378 A JP 11921378A JP S5546522 A JPS5546522 A JP S5546522A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- resistance
- wiring
- polysilicon
- laser light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 4
- 229920005591 polysilicon Polymers 0.000 abstract 4
- 239000012535 impurity Substances 0.000 abstract 2
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11921378A JPS5546522A (en) | 1978-09-29 | 1978-09-29 | Method of manufacturing semiconductor device |
US06/077,272 US4267011A (en) | 1978-09-29 | 1979-09-20 | Method for manufacturing a semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11921378A JPS5546522A (en) | 1978-09-29 | 1978-09-29 | Method of manufacturing semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5546522A true JPS5546522A (en) | 1980-04-01 |
JPS6327858B2 JPS6327858B2 (enrdf_load_stackoverflow) | 1988-06-06 |
Family
ID=14755733
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11921378A Granted JPS5546522A (en) | 1978-09-29 | 1978-09-29 | Method of manufacturing semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5546522A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5126277A (en) * | 1988-06-07 | 1992-06-30 | Oki Electric Industry Co., Ltd. | Method of manufacturing a semiconductor device having a resistor |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5085874A (enrdf_load_stackoverflow) * | 1973-12-03 | 1975-07-10 | ||
JPS5328385A (en) * | 1976-08-27 | 1978-03-16 | Fujitsu Ltd | Semiconductor device |
-
1978
- 1978-09-29 JP JP11921378A patent/JPS5546522A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5085874A (enrdf_load_stackoverflow) * | 1973-12-03 | 1975-07-10 | ||
JPS5328385A (en) * | 1976-08-27 | 1978-03-16 | Fujitsu Ltd | Semiconductor device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5126277A (en) * | 1988-06-07 | 1992-06-30 | Oki Electric Industry Co., Ltd. | Method of manufacturing a semiconductor device having a resistor |
Also Published As
Publication number | Publication date |
---|---|
JPS6327858B2 (enrdf_load_stackoverflow) | 1988-06-06 |
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