JPS6327858B2 - - Google Patents

Info

Publication number
JPS6327858B2
JPS6327858B2 JP53119213A JP11921378A JPS6327858B2 JP S6327858 B2 JPS6327858 B2 JP S6327858B2 JP 53119213 A JP53119213 A JP 53119213A JP 11921378 A JP11921378 A JP 11921378A JP S6327858 B2 JPS6327858 B2 JP S6327858B2
Authority
JP
Japan
Prior art keywords
layer
poly
film
resistance
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53119213A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5546522A (en
Inventor
Sunao Shibata
Hisakazu Iizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP11921378A priority Critical patent/JPS5546522A/ja
Priority to US06/077,272 priority patent/US4267011A/en
Publication of JPS5546522A publication Critical patent/JPS5546522A/ja
Publication of JPS6327858B2 publication Critical patent/JPS6327858B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP11921378A 1978-09-29 1978-09-29 Method of manufacturing semiconductor device Granted JPS5546522A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11921378A JPS5546522A (en) 1978-09-29 1978-09-29 Method of manufacturing semiconductor device
US06/077,272 US4267011A (en) 1978-09-29 1979-09-20 Method for manufacturing a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11921378A JPS5546522A (en) 1978-09-29 1978-09-29 Method of manufacturing semiconductor device

Publications (2)

Publication Number Publication Date
JPS5546522A JPS5546522A (en) 1980-04-01
JPS6327858B2 true JPS6327858B2 (enrdf_load_stackoverflow) 1988-06-06

Family

ID=14755733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11921378A Granted JPS5546522A (en) 1978-09-29 1978-09-29 Method of manufacturing semiconductor device

Country Status (1)

Country Link
JP (1) JPS5546522A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01308063A (ja) * 1988-06-07 1989-12-12 Oki Electric Ind Co Ltd 半導体抵抗素子及びその形成方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643613B2 (enrdf_load_stackoverflow) * 1973-12-03 1981-10-14
JPS6022502B2 (ja) * 1976-08-27 1985-06-03 富士通株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5546522A (en) 1980-04-01

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