JPS5546521A - Method of manufacturing semiconductor device - Google Patents

Method of manufacturing semiconductor device

Info

Publication number
JPS5546521A
JPS5546521A JP11921278A JP11921278A JPS5546521A JP S5546521 A JPS5546521 A JP S5546521A JP 11921278 A JP11921278 A JP 11921278A JP 11921278 A JP11921278 A JP 11921278A JP S5546521 A JPS5546521 A JP S5546521A
Authority
JP
Japan
Prior art keywords
layer
impurity
substrate
produced
polysilicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11921278A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6231493B2 (enrdf_load_stackoverflow
Inventor
Sunao Shibata
Hisakazu Iizuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11921278A priority Critical patent/JPS5546521A/ja
Priority to US06/077,272 priority patent/US4267011A/en
Publication of JPS5546521A publication Critical patent/JPS5546521A/ja
Publication of JPS6231493B2 publication Critical patent/JPS6231493B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP11921278A 1978-09-29 1978-09-29 Method of manufacturing semiconductor device Granted JPS5546521A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11921278A JPS5546521A (en) 1978-09-29 1978-09-29 Method of manufacturing semiconductor device
US06/077,272 US4267011A (en) 1978-09-29 1979-09-20 Method for manufacturing a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11921278A JPS5546521A (en) 1978-09-29 1978-09-29 Method of manufacturing semiconductor device

Publications (2)

Publication Number Publication Date
JPS5546521A true JPS5546521A (en) 1980-04-01
JPS6231493B2 JPS6231493B2 (enrdf_load_stackoverflow) 1987-07-08

Family

ID=14755706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11921278A Granted JPS5546521A (en) 1978-09-29 1978-09-29 Method of manufacturing semiconductor device

Country Status (1)

Country Link
JP (1) JPS5546521A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5085874A (enrdf_load_stackoverflow) * 1973-12-03 1975-07-10
JPS5328385A (en) * 1976-08-27 1978-03-16 Fujitsu Ltd Semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5085874A (enrdf_load_stackoverflow) * 1973-12-03 1975-07-10
JPS5328385A (en) * 1976-08-27 1978-03-16 Fujitsu Ltd Semiconductor device

Also Published As

Publication number Publication date
JPS6231493B2 (enrdf_load_stackoverflow) 1987-07-08

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