JPS5546463A - Particle beam irradiating analyzer - Google Patents

Particle beam irradiating analyzer

Info

Publication number
JPS5546463A
JPS5546463A JP12086378A JP12086378A JPS5546463A JP S5546463 A JPS5546463 A JP S5546463A JP 12086378 A JP12086378 A JP 12086378A JP 12086378 A JP12086378 A JP 12086378A JP S5546463 A JPS5546463 A JP S5546463A
Authority
JP
Japan
Prior art keywords
specimen
optimal
axis
signal
derivative
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12086378A
Other languages
Japanese (ja)
Other versions
JPS5916704B2 (en
Inventor
Hiromi Kawaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP53120863A priority Critical patent/JPS5916704B2/en
Publication of JPS5546463A publication Critical patent/JPS5546463A/en
Publication of JPS5916704B2 publication Critical patent/JPS5916704B2/en
Expired legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To automatically converge the particle flux onto a specimen, by detecting optimal upper and lower positions for each axis where the derivative of image signal becomes maximum, then positioning the face of specimen at the intermediate position of them.
CONSTITUTION: The specimen 2 is lifted in step by up/down movement driver 8 and the face of specimen is repeatedly scanned by electron beam 1 in both X and Y directions at each step, then the detector 4 detcts the secondary electron 3 and outputs as imags signal. Said signal is stored in X and Y axis image signal memories 16, 17 for each scanning axis, and used at differentiating section 18 for selecting the representative derivative in each step. Then max. differential signal position detector 21 detects the position, for each scanning axis, corresponding with max. value of representative derivative, then optimal upper/lower position detector 22 calculates the optimal position of specimen and the drive section 8 brings the specimen 2 to optimal position.
COPYRIGHT: (C)1980,JPO&Japio
JP53120863A 1978-09-29 1978-09-29 Particle beam irradiation analyzer Expired JPS5916704B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53120863A JPS5916704B2 (en) 1978-09-29 1978-09-29 Particle beam irradiation analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53120863A JPS5916704B2 (en) 1978-09-29 1978-09-29 Particle beam irradiation analyzer

Publications (2)

Publication Number Publication Date
JPS5546463A true JPS5546463A (en) 1980-04-01
JPS5916704B2 JPS5916704B2 (en) 1984-04-17

Family

ID=14796811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53120863A Expired JPS5916704B2 (en) 1978-09-29 1978-09-29 Particle beam irradiation analyzer

Country Status (1)

Country Link
JP (1) JPS5916704B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825048A (en) * 1981-07-17 1983-02-15 Jeol Ltd Electron microscope
JPS60189856A (en) * 1984-03-10 1985-09-27 Jeol Ltd X-ray microanalyzer and similar device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825048A (en) * 1981-07-17 1983-02-15 Jeol Ltd Electron microscope
JPS60189856A (en) * 1984-03-10 1985-09-27 Jeol Ltd X-ray microanalyzer and similar device
JPH057822B2 (en) * 1984-03-10 1993-01-29 Nippon Electron Optics Lab

Also Published As

Publication number Publication date
JPS5916704B2 (en) 1984-04-17

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