JPS5546463A - Particle beam irradiating analyzer - Google Patents
Particle beam irradiating analyzerInfo
- Publication number
- JPS5546463A JPS5546463A JP12086378A JP12086378A JPS5546463A JP S5546463 A JPS5546463 A JP S5546463A JP 12086378 A JP12086378 A JP 12086378A JP 12086378 A JP12086378 A JP 12086378A JP S5546463 A JPS5546463 A JP S5546463A
- Authority
- JP
- Japan
- Prior art keywords
- specimen
- optimal
- axis
- signal
- derivative
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE: To automatically converge the particle flux onto a specimen, by detecting optimal upper and lower positions for each axis where the derivative of image signal becomes maximum, then positioning the face of specimen at the intermediate position of them.
CONSTITUTION: The specimen 2 is lifted in step by up/down movement driver 8 and the face of specimen is repeatedly scanned by electron beam 1 in both X and Y directions at each step, then the detector 4 detcts the secondary electron 3 and outputs as imags signal. Said signal is stored in X and Y axis image signal memories 16, 17 for each scanning axis, and used at differentiating section 18 for selecting the representative derivative in each step. Then max. differential signal position detector 21 detects the position, for each scanning axis, corresponding with max. value of representative derivative, then optimal upper/lower position detector 22 calculates the optimal position of specimen and the drive section 8 brings the specimen 2 to optimal position.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53120863A JPS5916704B2 (en) | 1978-09-29 | 1978-09-29 | Particle beam irradiation analyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53120863A JPS5916704B2 (en) | 1978-09-29 | 1978-09-29 | Particle beam irradiation analyzer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5546463A true JPS5546463A (en) | 1980-04-01 |
JPS5916704B2 JPS5916704B2 (en) | 1984-04-17 |
Family
ID=14796811
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53120863A Expired JPS5916704B2 (en) | 1978-09-29 | 1978-09-29 | Particle beam irradiation analyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5916704B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5825048A (en) * | 1981-07-17 | 1983-02-15 | Jeol Ltd | Electron microscope |
JPS60189856A (en) * | 1984-03-10 | 1985-09-27 | Jeol Ltd | X-ray microanalyzer and similar device |
-
1978
- 1978-09-29 JP JP53120863A patent/JPS5916704B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5825048A (en) * | 1981-07-17 | 1983-02-15 | Jeol Ltd | Electron microscope |
JPS60189856A (en) * | 1984-03-10 | 1985-09-27 | Jeol Ltd | X-ray microanalyzer and similar device |
JPH057822B2 (en) * | 1984-03-10 | 1993-01-29 | Nippon Electron Optics Lab |
Also Published As
Publication number | Publication date |
---|---|
JPS5916704B2 (en) | 1984-04-17 |
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