JPS52115249A - Detecting method of deviation of electron beams and moving direction o f materials - Google Patents

Detecting method of deviation of electron beams and moving direction o f materials

Info

Publication number
JPS52115249A
JPS52115249A JP3185876A JP3185876A JPS52115249A JP S52115249 A JPS52115249 A JP S52115249A JP 3185876 A JP3185876 A JP 3185876A JP 3185876 A JP3185876 A JP 3185876A JP S52115249 A JPS52115249 A JP S52115249A
Authority
JP
Japan
Prior art keywords
deviation
electron beams
materials
moving direction
detecting method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3185876A
Other languages
Japanese (ja)
Other versions
JPS5848042B2 (en
Inventor
Nobuo Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP51031858A priority Critical patent/JPS5848042B2/en
Publication of JPS52115249A publication Critical patent/JPS52115249A/en
Publication of JPS5848042B2 publication Critical patent/JPS5848042B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To detect deviation by subsequently withdrawing the two electron beams formed by two slits and deflecting means, projecting said beams to a material, scanning the electron beames ober the material, moving the material and obtaining the relative position relation of the reference object part on the material.
COPYRIGHT: (C)1977,JPO&Japio
JP51031858A 1976-03-23 1976-03-23 Method for detecting deviation between electron beam and material movement direction Expired JPS5848042B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51031858A JPS5848042B2 (en) 1976-03-23 1976-03-23 Method for detecting deviation between electron beam and material movement direction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51031858A JPS5848042B2 (en) 1976-03-23 1976-03-23 Method for detecting deviation between electron beam and material movement direction

Publications (2)

Publication Number Publication Date
JPS52115249A true JPS52115249A (en) 1977-09-27
JPS5848042B2 JPS5848042B2 (en) 1983-10-26

Family

ID=12342737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51031858A Expired JPS5848042B2 (en) 1976-03-23 1976-03-23 Method for detecting deviation between electron beam and material movement direction

Country Status (1)

Country Link
JP (1) JPS5848042B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6263425A (en) * 1986-08-26 1987-03-20 Toshiba Corp Electron beam exposure system
JPH0629197A (en) * 1993-04-05 1994-02-04 Toshiba Corp Charged particle beam lithography
JPH0629198A (en) * 1993-04-05 1994-02-04 Toshiba Corp Charged particle beam lithography

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6263425A (en) * 1986-08-26 1987-03-20 Toshiba Corp Electron beam exposure system
JPH0559577B2 (en) * 1986-08-26 1993-08-31 Tokyo Shibaura Electric Co
JPH0629197A (en) * 1993-04-05 1994-02-04 Toshiba Corp Charged particle beam lithography
JPH0629198A (en) * 1993-04-05 1994-02-04 Toshiba Corp Charged particle beam lithography

Also Published As

Publication number Publication date
JPS5848042B2 (en) 1983-10-26

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