JPS52109959A - Detecting deviation in electron beams - Google Patents

Detecting deviation in electron beams

Info

Publication number
JPS52109959A
JPS52109959A JP2637576A JP2637576A JPS52109959A JP S52109959 A JPS52109959 A JP S52109959A JP 2637576 A JP2637576 A JP 2637576A JP 2637576 A JP2637576 A JP 2637576A JP S52109959 A JPS52109959 A JP S52109959A
Authority
JP
Japan
Prior art keywords
electron beams
detecting deviation
deviation
detecting
determing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2637576A
Other languages
Japanese (ja)
Other versions
JPS5848041B2 (en
Inventor
Nobuo Goto
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP51026375A priority Critical patent/JPS5848041B2/ja
Publication of JPS52109959A publication Critical patent/JPS52109959A/en
Publication of JPS5848041B2 publication Critical patent/JPS5848041B2/ja
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To detect the deviation between the side direction of electron beams of a polygonal section and the scanning direction by determing the relative positional relation for a reference object on a material based on the information obtained from the material by means of electron beam scanning.
COPYRIGHT: (C)1977,JPO&Japio
JP51026375A 1976-03-11 1976-03-11 Expired JPS5848041B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51026375A JPS5848041B2 (en) 1976-03-11 1976-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51026375A JPS5848041B2 (en) 1976-03-11 1976-03-11

Publications (2)

Publication Number Publication Date
JPS52109959A true JPS52109959A (en) 1977-09-14
JPS5848041B2 JPS5848041B2 (en) 1983-10-26

Family

ID=12191753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51026375A Expired JPS5848041B2 (en) 1976-03-11 1976-03-11

Country Status (1)

Country Link
JP (1) JPS5848041B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5891634A (en) * 1981-11-26 1983-05-31 Toshiba Corp Measurement of revolution correction amount of deflection electrode

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5891634A (en) * 1981-11-26 1983-05-31 Toshiba Corp Measurement of revolution correction amount of deflection electrode

Also Published As

Publication number Publication date
JPS5848041B2 (en) 1983-10-26

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