JPS5543886A - Furnace pipe for processing semiconductor - Google Patents
Furnace pipe for processing semiconductorInfo
- Publication number
- JPS5543886A JPS5543886A JP11726078A JP11726078A JPS5543886A JP S5543886 A JPS5543886 A JP S5543886A JP 11726078 A JP11726078 A JP 11726078A JP 11726078 A JP11726078 A JP 11726078A JP S5543886 A JPS5543886 A JP S5543886A
- Authority
- JP
- Japan
- Prior art keywords
- grown
- withstanding
- silicon nitride
- carbon rod
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000007789 gas Substances 0.000 abstract 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 3
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 3
- 229910052799 carbon Inorganic materials 0.000 abstract 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 230000001590 oxidative effect Effects 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 abstract 1
- 229910004077 HF-HNO3 Inorganic materials 0.000 abstract 1
- -1 ammonia Chemical compound 0.000 abstract 1
- 229910021529 ammonia Inorganic materials 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 abstract 1
- 238000001816 cooling Methods 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000005049 silicon tetrachloride Substances 0.000 abstract 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11726078A JPS5543886A (en) | 1978-09-22 | 1978-09-22 | Furnace pipe for processing semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11726078A JPS5543886A (en) | 1978-09-22 | 1978-09-22 | Furnace pipe for processing semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5543886A true JPS5543886A (en) | 1980-03-27 |
| JPS6120130B2 JPS6120130B2 (enrdf_load_stackoverflow) | 1986-05-21 |
Family
ID=14707349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11726078A Granted JPS5543886A (en) | 1978-09-22 | 1978-09-22 | Furnace pipe for processing semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5543886A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6161831U (enrdf_load_stackoverflow) * | 1984-09-26 | 1986-04-25 |
-
1978
- 1978-09-22 JP JP11726078A patent/JPS5543886A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6161831U (enrdf_load_stackoverflow) * | 1984-09-26 | 1986-04-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6120130B2 (enrdf_load_stackoverflow) | 1986-05-21 |
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