JPS5542049A - Hydrogen gas detecting element - Google Patents
Hydrogen gas detecting elementInfo
- Publication number
- JPS5542049A JPS5542049A JP11550578A JP11550578A JPS5542049A JP S5542049 A JPS5542049 A JP S5542049A JP 11550578 A JP11550578 A JP 11550578A JP 11550578 A JP11550578 A JP 11550578A JP S5542049 A JPS5542049 A JP S5542049A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- hydrogen gas
- detecting element
- film
- varying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11550578A JPS5542049A (en) | 1978-09-20 | 1978-09-20 | Hydrogen gas detecting element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11550578A JPS5542049A (en) | 1978-09-20 | 1978-09-20 | Hydrogen gas detecting element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5542049A true JPS5542049A (en) | 1980-03-25 |
| JPS6133130B2 JPS6133130B2 (enExample) | 1986-07-31 |
Family
ID=14664172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11550578A Granted JPS5542049A (en) | 1978-09-20 | 1978-09-20 | Hydrogen gas detecting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5542049A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0658761A1 (en) * | 1993-12-06 | 1995-06-21 | Motorola Inc. | Gas vapor sensor element and method of forming |
-
1978
- 1978-09-20 JP JP11550578A patent/JPS5542049A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0658761A1 (en) * | 1993-12-06 | 1995-06-21 | Motorola Inc. | Gas vapor sensor element and method of forming |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6133130B2 (enExample) | 1986-07-31 |
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