JPS5318990A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5318990A JPS5318990A JP9386776A JP9386776A JPS5318990A JP S5318990 A JPS5318990 A JP S5318990A JP 9386776 A JP9386776 A JP 9386776A JP 9386776 A JP9386776 A JP 9386776A JP S5318990 A JPS5318990 A JP S5318990A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- metal wirings
- oxide
- avert
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Abstract
PURPOSE: To avert the step cutting of metal wirings by coating an emulsion type oxide comprising dissolving an organic silane base material into an alcohol solution on the entire surface of a semiconductor substrate prior to formation of metal wirings and sintering said oxide.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9386776A JPS5318990A (en) | 1976-08-05 | 1976-08-05 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9386776A JPS5318990A (en) | 1976-08-05 | 1976-08-05 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5318990A true JPS5318990A (en) | 1978-02-21 |
Family
ID=14094389
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9386776A Pending JPS5318990A (en) | 1976-08-05 | 1976-08-05 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5318990A (en) |
-
1976
- 1976-08-05 JP JP9386776A patent/JPS5318990A/en active Pending
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