JPS5542049A - Hydrogen gas detecting element - Google Patents
Hydrogen gas detecting elementInfo
- Publication number
- JPS5542049A JPS5542049A JP11550578A JP11550578A JPS5542049A JP S5542049 A JPS5542049 A JP S5542049A JP 11550578 A JP11550578 A JP 11550578A JP 11550578 A JP11550578 A JP 11550578A JP S5542049 A JPS5542049 A JP S5542049A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- hydrogen gas
- detecting element
- film
- varying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
PURPOSE: To enable detection of hydrogen gas stably at room temperature by a hydrogen gas detecting element by making a semiconductor contact with a metallic thin film varying its work function by hydrogen absorption.
CONSTITUTION: Crystal 1 of semiconductor such as, for example, zinc oxide, tin oxide, etc. is surface treated to thereby remove its machined layer, irregular layer, contamination. After an insulator 2 such as, for example, silicon nitride film is coated on the crystal 1, it is perforated by a photoetching process, and accumulated with ormic contact electrode 3 such as, for example, indium film by a vacuum depositing process, and with a metallic thin film 4 such as palladium thin film, nickel thin film, etc. varying its work function by hydrogen absorption. Lead wires 5 and 6 are mounted to the electrode 3 and the thin film 4, respectively to thereby form a diode.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11550578A JPS5542049A (en) | 1978-09-20 | 1978-09-20 | Hydrogen gas detecting element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11550578A JPS5542049A (en) | 1978-09-20 | 1978-09-20 | Hydrogen gas detecting element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5542049A true JPS5542049A (en) | 1980-03-25 |
JPS6133130B2 JPS6133130B2 (en) | 1986-07-31 |
Family
ID=14664172
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11550578A Granted JPS5542049A (en) | 1978-09-20 | 1978-09-20 | Hydrogen gas detecting element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5542049A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0658761A1 (en) * | 1993-12-06 | 1995-06-21 | Motorola Inc. | Gas vapor sensor element and method of forming |
-
1978
- 1978-09-20 JP JP11550578A patent/JPS5542049A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0658761A1 (en) * | 1993-12-06 | 1995-06-21 | Motorola Inc. | Gas vapor sensor element and method of forming |
Also Published As
Publication number | Publication date |
---|---|
JPS6133130B2 (en) | 1986-07-31 |
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