JPS5529115A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5529115A JPS5529115A JP10179078A JP10179078A JPS5529115A JP S5529115 A JPS5529115 A JP S5529115A JP 10179078 A JP10179078 A JP 10179078A JP 10179078 A JP10179078 A JP 10179078A JP S5529115 A JPS5529115 A JP S5529115A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- diffusion
- fet
- psg
- emitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 238000009792 diffusion process Methods 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000006185 dispersion Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10179078A JPS5529115A (en) | 1978-08-23 | 1978-08-23 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10179078A JPS5529115A (en) | 1978-08-23 | 1978-08-23 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5529115A true JPS5529115A (en) | 1980-03-01 |
| JPS639387B2 JPS639387B2 (enrdf_load_stackoverflow) | 1988-02-29 |
Family
ID=14309954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10179078A Granted JPS5529115A (en) | 1978-08-23 | 1978-08-23 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5529115A (enrdf_load_stackoverflow) |
-
1978
- 1978-08-23 JP JP10179078A patent/JPS5529115A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS639387B2 (enrdf_load_stackoverflow) | 1988-02-29 |
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