JPS5527644A - Multi-layer wiring type semiconductor device - Google Patents

Multi-layer wiring type semiconductor device

Info

Publication number
JPS5527644A
JPS5527644A JP10074678A JP10074678A JPS5527644A JP S5527644 A JPS5527644 A JP S5527644A JP 10074678 A JP10074678 A JP 10074678A JP 10074678 A JP10074678 A JP 10074678A JP S5527644 A JPS5527644 A JP S5527644A
Authority
JP
Japan
Prior art keywords
film
phosphosilicic acid
phosphosilicic
wiring
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10074678A
Other languages
English (en)
Inventor
Masaru Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10074678A priority Critical patent/JPS5527644A/ja
Publication of JPS5527644A publication Critical patent/JPS5527644A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
  • Local Oxidation Of Silicon (AREA)
JP10074678A 1978-08-17 1978-08-17 Multi-layer wiring type semiconductor device Pending JPS5527644A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10074678A JPS5527644A (en) 1978-08-17 1978-08-17 Multi-layer wiring type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10074678A JPS5527644A (en) 1978-08-17 1978-08-17 Multi-layer wiring type semiconductor device

Publications (1)

Publication Number Publication Date
JPS5527644A true JPS5527644A (en) 1980-02-27

Family

ID=14282100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10074678A Pending JPS5527644A (en) 1978-08-17 1978-08-17 Multi-layer wiring type semiconductor device

Country Status (1)

Country Link
JP (1) JPS5527644A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4472730A (en) * 1980-12-29 1984-09-18 Nippon Electric Co., Ltd. Semiconductor device having an improved moisture resistance
JPS6358843A (ja) * 1985-08-27 1988-03-14 ゼネラル　エレクトリツク　カンパニイ 半導体装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52102691A (en) * 1976-02-25 1977-08-29 Hitachi Ltd Formation of wiring on insulating layer having steps
JPS5320780A (en) * 1976-08-10 1978-02-25 Toshiba Corp Semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52102691A (en) * 1976-02-25 1977-08-29 Hitachi Ltd Formation of wiring on insulating layer having steps
JPS5320780A (en) * 1976-08-10 1978-02-25 Toshiba Corp Semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4472730A (en) * 1980-12-29 1984-09-18 Nippon Electric Co., Ltd. Semiconductor device having an improved moisture resistance
JPS6358843A (ja) * 1985-08-27 1988-03-14 ゼネラル　エレクトリツク　カンパニイ 半導体装置

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