JPS55167130A - Metal oxide thin film forming method - Google Patents

Metal oxide thin film forming method

Info

Publication number
JPS55167130A
JPS55167130A JP7298779A JP7298779A JPS55167130A JP S55167130 A JPS55167130 A JP S55167130A JP 7298779 A JP7298779 A JP 7298779A JP 7298779 A JP7298779 A JP 7298779A JP S55167130 A JPS55167130 A JP S55167130A
Authority
JP
Japan
Prior art keywords
soln
film
metal oxide
thin film
oxide thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7298779A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6144950B2 (enrdf_load_stackoverflow
Inventor
Masaaki Okunaka
Ryoichi Sudo
Ataru Yokono
Hideo Takahashi
Tokio Isogai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7298779A priority Critical patent/JPS55167130A/ja
Publication of JPS55167130A publication Critical patent/JPS55167130A/ja
Publication of JPS6144950B2 publication Critical patent/JPS6144950B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemically Coating (AREA)
  • Inorganic Insulating Materials (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP7298779A 1979-06-12 1979-06-12 Metal oxide thin film forming method Granted JPS55167130A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7298779A JPS55167130A (en) 1979-06-12 1979-06-12 Metal oxide thin film forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7298779A JPS55167130A (en) 1979-06-12 1979-06-12 Metal oxide thin film forming method

Publications (2)

Publication Number Publication Date
JPS55167130A true JPS55167130A (en) 1980-12-26
JPS6144950B2 JPS6144950B2 (enrdf_load_stackoverflow) 1986-10-06

Family

ID=13505246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7298779A Granted JPS55167130A (en) 1979-06-12 1979-06-12 Metal oxide thin film forming method

Country Status (1)

Country Link
JP (1) JPS55167130A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694651A (en) * 1979-12-28 1981-07-31 Tokyo Denshi Kagaku Kabushiki Manufacture of material for electronic parts
JPH1192946A (ja) * 1997-09-19 1999-04-06 Shinto Paint Co Ltd 金属酸化物膜の形成方法
US8445118B2 (en) 2006-07-13 2013-05-21 Central Japan Railway Company Coating liquid, metal compound film formed by coating liquid, and forming method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694651A (en) * 1979-12-28 1981-07-31 Tokyo Denshi Kagaku Kabushiki Manufacture of material for electronic parts
JPH1192946A (ja) * 1997-09-19 1999-04-06 Shinto Paint Co Ltd 金属酸化物膜の形成方法
US8445118B2 (en) 2006-07-13 2013-05-21 Central Japan Railway Company Coating liquid, metal compound film formed by coating liquid, and forming method thereof

Also Published As

Publication number Publication date
JPS6144950B2 (enrdf_load_stackoverflow) 1986-10-06

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